EL-FLOW® Laboratory style
GAS Mass Flow Meters / Mass Flow Controllers
General
EL-FLOW® Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a 'laboratory style' pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows from:
lowest range 0,02...1 mln/min
up to highest range 25...1250 ln/min
The control valve design of the mass flow controller distinguishes itself from competitive designs in its truly modular construction and it can be field replaced or changed by the user without any adjustment. The standard valve is normally closed and is available up to Kv-values of 1.5. Normally opened valves can also be supplied. Patented constructions enable us to handle high flows and/or pressures at differential pressures up to 400 bar in the EL-FLOW® program, which is unique.
NEW
In 2006 Bronkhorst High-Tech introduced the EL-FLOW Select Series with Multi Fluid / Multi Range functionalilty. Click here for more information.
"Multibus" Digital Mass Flow Meters/Controllers
In some applications there are more requirements for a modern instrument than analog-based technology can offer. Examples of these requirements are self-diagnostics, alarm and counter functions, digital communication and remotely adjustable control settings. These requirements can only be met with a digital based instrument. Therefore Bronkhorst High-Tech developed a field bus based pc-board for their mass flow metering and control solutions. The latest digital instruments offer great flexibility thanks to the "multibus" concept, thanks to which the instruments can be equipped with on-board interface board with DeviceNetTM, Profibus-DP®, Modbus or FLOW-BUS protocol. More information about digital "multibus" communication.
Features
- High accuracy (standard 1% FS;
on request 0,5% of Rd plus 0,1% of FS)
- Fast response (down to 200 msec)
- Pressure ratings up to 400 bar (higher on request)
- Electro-chemical polish of all surfaces
- Compact, modular construction
- No moving parts
- Metal sealed and/or down-ported versions available
Applications
- Analytical/environmental equipment
- Gas flow monitoring in food, chemical and petrochemical industries
- Gas consumption measurement in gas distribution systems for internal accounting purposes
- Detection of gas leakage through objects
- Semiconductor manufacturing
- Surface treatment installations
Flow capacities (based on air)
Mass Flow Meters (MFM);
PN100 |
Ranges |
| Series F-110C |
min. 0,02 ... 1 mln/min
max. 0,2 ... 10 mln/min |
| Series F-111C |
min. 0,2 ... 10 mln/min
max. 0,3 ... 15 ln/min |
| Series F-111CM (metal sealed) |
min. 0,1 ... 5 mln/min
max. 2 ... 100 ln/min |
| Series F-112AC |
min. 0,2 ... 10 ln/min
max. 5 ... 250 ln/min |
| Series F-113AC |
min. 2 ... 100 ln/min
max. 25 ... 1250 ln/min |
Mass Flow Meters (MFM);
PN200 / PN400 |
Ranges |
| Series F-120M / F-130M |
min. 0,2 ... 10 mln/min
max. 0,3 ... 15 mln/min |
| Series F-121M / F-131M |
min. 0,3 ... 15 mln/min
max. 0,4 ... 20 ln/min |
| Series F-122M / F-132M |
min. 0,2 ... 10 ln/min
max. 6 ... 250 ln/min |
| Series F-123M / F-133M |
min. 4 ... 200 ln/min
max. 25 ... 1250 ln/min |
Mass Flow Controllers (MFC);
PN64 / PN100 |
Ranges |
| Series F-200CV / F-210CV 1) |
min. 0,02 ... 1 mln/min
max. 0,2 ... 10 mln/min |
| Series F-201C / F-211C 1) |
min. 0,2 ... 10 mln/min
max. 0,3 ... 15 ln/min |
| Series F-201CM (metal sealed) 1) |
min. 0,2 ... 10 mln/min
max. 2 ... 100 ln/min |
| Series F-201AC / F-211AC 1) |
min. 0,2 ... 10 ln/min
max. 1,4 ... 70 ln/min |
| Series F-202AC / F-212AC 2) |
min. 0,2 ... 10 ln/min
max. 5 ... 250 ln/min |
| Series F-203AC / F-213AC 2) |
min. 2 ... 100 ln/min
max. 25 ... 1250 ln/min |
MFCs for high-pressure /
high-DP applications; PN400 |
Ranges |
| Series F-230M 3) |
min. 0,2 ... 10 mln/min
max. 14 ...700 mln/min |
| Series F-231M 3) |
min. 6 ... 300 mln/min
max. 0,26 ... 13 ln/min |
| Series F-232M 3) |
min. 0,14 ... 7 ln/min
max. 2 ... 100 ln/min |
1) with small type of valve for normal applications
2) with pilot-operated valve for high flow applications
3) with vary-p-valve for high (differential) pressure applications up to 400 bar
Brochures
For more info see brochures "EL-FLOW digital thermal mass flow meters/controllers for gases" and "Metal Sealed Digital Mass Flow / Pressure Meters and Controllers" | 
F-201CV Mass Flow Controller
F-110C Mass Flow Meter
F-112AC Mass Flow Meter
F-201CM Metal Sealed Mass Flow Controller
F-232M Mass Flow Controller with Vary-P Valve, PN400
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