COMBI-FLOW  Metal Sealed
Mass Flow and Pressure Meters / Controllers

General

The instruments of the COMBI-FLOW series are characterised by the fact that there is only one metal-to-metal seal per module; this seal maintains its tightness over and over again.
They distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semi-conductor industry requirements as well as other high purity gas applications. The base block of the modules is identical for each different function (except the on-off valve function) and can be put in series by using either vacuum couplings or welded connections.

 Features

• Ultraclean, electropolished
• Metal sealed
• Cleanroom assembled
• Compact arrangement
• Modular design
• Super stable zero (no need for auto-zero circuit)
• High accuracy and repeatability 

Available modules

Mass Flow Meters (F1/F2)
For flows between 0,2 ... 10 mln/min and 2 ... 100 ln/min N2-equivalent.

Pressure Transducer (P5/P6/P7)
With piezo-resistive pressure sensor for pressure ranges between 6 ... 300 mbar and 0,2 ... 10 bar absolute or relative.

Filter (M0/M1)
As ultra pure PVDF fine filter 0,05 µm or sintered stainless steel filter 0,5, 2, 7 or 15 µm

Control valve (C0/C1)
Normally closed or open, for flow or pressure control with Kv max. 4,9 x 10^-2.
Maximum temperature 70°C

On/Off Valve (S0/S1)
Pressure activated, NO or NC

Brochure

For more info see brochure "COMBI-FLOW mass flow and pressure measurement and control "