CEM-System
Liquid Delivery System with Vapour Control
General
The CEM-System (Controlled Evaporation and Mixing) is an innovative
Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum
processes. The vapour generation system consists of a liquid flow controller,
an MFC for carrier gas and a temperature controlled mixing and evaporation
device. The system is suitable for mixing liquid flows of 0,25-1200 g/h
resulting in saturated vapour flows of 50 mln/min up to 100
ln/min. This vaporizer system can replace bubblers. New opportunities
created with the CEM-system: mixtures can be evaporated and even solids,
dissolved in solvents can be vaporised successfully.
The evaporation system is fast, accurate, highly repeatable and efficient.
Features
- Accurately controlled gas/liquid mixture (mass flow)
- Fast response
- High reproducibility
- Handles water, solvents, liquid mixtures
- Very stable vapour flow
- Flexible selection of gas/liquid ratio
- Lower working temperature than conventional system
Applications
- CVD (Chemical Vapour Deposition), e.g. for hardening, thin film coating or
planarization processes
- Testing/calibration of analyzers with reference gas vapor concentrations
- Toxic gas effects on protective clothing
- Analyzers with reference H2O vapour concentrations
- Humidification of fuels
- Anaesthetics
Capacities
|
Model
|
Description
|
Max. capacity
(based on water)
|
Max. capacity
|
Max. temp.
|
| W-101A |
10 W, for µ-FLOW |
2 g/h Liquid |
4 ln/min Gas |
200°C |
| W-102A |
10 W, for LIQUI-FLOW® |
30 g/h Liquid |
4 ln/min Gas |
200°C |
| W-202A |
100 W, for LIQUI-FLOW® |
120 g/h Liquid |
10 ln/min Gas |
200°C
|
| W-303A |
1000 W, for LIQUI-FLOW® |
1200 g/h Liquid |
100 ln/min Gas |
200°C |
Leaflet
For more information see leaflet "CEM
Liquid Delivery System"
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