Ex-Proof Mass Flow Controller for High Gas Flow

  • ATEX approval Cat.2, Zone 1
  • High accuracy, excellent repeatability
  • Virtually pressure and temperature independent
  • Compact design
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Intrinsically Safe Gas Mass Flow Controllers for high flow rates

Bronkhorst® EX-FLOW Mass Flow Controllers (MFCs) are suited for precise gas flow control in ATEX Zone 1 hazardous areas. The flow meter part and the control valve of the MFC should be connected (via separate cables) to a power supply with galvanic isolation / preamplifier / readout system (located in the safe zone) which contains a controller board to complete the control loop. See Bronkhorst® E-8000 Series.

EX-FLOW model F-216AX covers flow ranges from 0,4...20 m3n/h up to 4...200 m3n/h (N2-equivalent) at operating pressures up to 100 bar.

The intrinsically safe measuring head of the flow meter is tested according to ATEX 114 Directive 2014/34/EU and approved under EC-Type Examination Number: KEMA 01ATEX1172, protection II 2 G Ex ib IIC T4 Gb.
The intrinsically safe valve coils are explosion proof certified and available in two options (ATEX certification only):
Coil XB: protection II 1 G Ex ia IIC T6 / protection II 1 D Ex ta IIIC T80°C
Coil XC: protection II 2 G Ex eb IIC T4 / protection II 2 D Ex tb IIIC T130°C

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,4…20 m3n/h
max. 4…200 m3n/h
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 1 % FS
Repeatability< 0,2 % RD
Turndown ratio1:50 (2…100%)
Time constant5 sec.
Control stability≤ ± 0,1 % FS typical
Operating temperature-10 … +65 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Max. Kv-value0,15 … 1,5
Leak integrity, outboardtested < 2 x 10-9  mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable
Pressure rating (PN)100 bar abs
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: Viton®;
options: EPDM, Kalrez® (FFKM)
Ingress protectionIP65
Electrical properties
Signal circuittype of explosion protection: intrinsic safety Ex ib IIC, only for connection to a certified intrinsically safe circuit with the following maximum values:
Ui = 28 V, Ii = 98 mA, Pi = 686 mW
The effective internal capacitance between:
Terminals 1 and 3: Ci = 1 nF;
Effective internal inductance: Li = 0,3 mH
Output signal15 … 20 mA (linear)
I/O signals via PS/Readout (located in safe area)analog: 0…5 Vdc, 0…10 Vdc, 0…20 mA, 4…20 mA;
digital: RS232, PROFIBUS DP, DeviceNet™, Modbus RTU or ASCII, PROFINET, EtherCAT®, FLOW- BUS
XB-coilCoil voltage max. 28 V/110 mA;
295 Ohm at 20°C
XC-coilCoil voltage max. 24 V;
65 Ohm at 20°C, Pmax = 9 W at 20°C
Electrical connection
Ex-proof measuring headTerminal connection, cable gland M16x1,5
Control valve coilcable gland M20x1,5
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


EX-FLOW brochure

Manual EX-FLOW meters and controllers - ATEX
Manual EX-FLOW meters and controllers - IECEx
Manual EX-FLOW meters and controllers - TIIS
Manual EX-FLOW meters and controllers - KCs

Hook-up diagram
MFM Measuring Head

Dimensional drawing
Dimensional drawing F-206AX-F-216AX

IECEx Certificate EX-FLOW MFM Measuring Head X100 : IECEx DEK14.0060
TIIS Certificate EX-FLOW MFM Measuring head X100 : 検・第TC21584号 (Japanese certification)
KCs Certificate EX-FLOW MFM Measuring Head X100 :: Ex ib IIC T4 (Korean certification)
ATEX CAT 2 Certificate EX-FLOW MFM Measuring Head X100 : KEMA 01ATEX1172
EU Declaration of Conformity Measuring Head X100 : ATEX CAT 2 (doc. 9.06.032)
ATEX CAT 2 Certificate XB-coil
ATEX CAT 2 Certificate XC-coil
ATEX CAT 2 Notification Directive 2014/34/EU : DEKRA 12ATEXQ0100


1 Kings Court
Willie Snaith Road
Newmarket Suffolk CB8 7TG
Tel. +44 1223 833222
[email protected]

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