Bronkhorst

FLEXI-FLOW Compact FF-M1x

Compact Mass Flow and Pressure Meter for Gases

  • On-board gas conversion model
  • 22 unique gases embedded
  • Multi-parameter output: mass flow, temperature and pressure
  • USB-C and Bluetooth communication
  • Namur NE107 status indication
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FLEXI-FLOW CompactFF-M1x

Mass Flow/Pressure Meter for Low Gas Flows

FLEXI-FLOW Compact models FF-M10 and FF-M11 Compact Mass Flow / Pressure Meters are suited for accurate measurement of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information: 
- Model FF-M10: flow + temperature
- Model FF-M11: flow + temperature + up- and downstream pressure


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0…500 mln/min
max. 0…20 ln/min
(based on N2)
Pressure rangesFF-M10: not available / FF-M11: 0...17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2);
for other gases add conversion uncertainty; see multi gas table;
RepeatabilityFlow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratioup to 1:1000
Max. operating pressure16 bar g
Multi Gas / Multi Rangeembedded gas data for 22 unique gases plus any mixture of these gases
Response time (sensor)< 30 ms (T63)
Long term stability< 0,5% FS over period of 3 years; then < 0,2% FS per year
Mountingany position, attitude sensitivity negligible
Temperature sensitivityFlow sensor: zero 0,0015% FS/ºC; span 0,03% Rd/ºC;
Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors±0,5% FS
Pressure sensitivitystandard: < 0,15% Rd/bar typical N2;
with pressure correction: < 0,02% Rd typical N2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Mechanical parts
Material (wetted parts)aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality< 1,6 mu Ra (<0,8 mu Ra for stainless steel body)
Pressure rating (PN)16 bar(g) / 250 psig
Process connectionsoptional: compression type, push-in or face seal couplings
Sealsdefault: FKM 51415;
for other materials contact factory
Weight200 g with Aluminium body, 300 g with SS 316 body
Ingress protectionIP40
Instrument bodyAluminium or Stainless steel (selectable)
Electrical properties
Power supply24 Vdc ± 10%
Max. power consumption0,35 Watt
Digital communicationModbus RTU or FLOW-BUS (selectable)
Support interfaceUSB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection9-pin D-sub (male)
CEEMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU
Electrical connection
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
FLEXI-FLOW brochure

Manuals
Manual FLEXI-FLOW
Quick installation guide FLEXI-FLOW

Hook-up diagrams
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS

Dimensional drawings
Dimensions FLEXI-FLOW Compact MFC-MFM

Solids 3D
FLEXI-FLOW Compact MFC-MFM


BRONKHORST (UK) Ltd

1 Kings Court
Willie Snaith Road
Newmarket Suffolk CB8 7TG
Tel. +44 1223 833222
sales@bronkhorst.co.uk

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