Bronkhorst

EL-FLOW Prestige FG-110C

High Performance Mass Flow Meter for Gases

  • On-board gas conversion model (Multi-Fluid / Multi-Range)
  • 100 unique gases embedded
  • User configurable I/O functions
  • Significantly reduced power consumption
  • Further advances in flow-signal processing
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EL-FLOW PrestigeFG-110C

Gas Mass Flow Meters for lowest flow rates

Bronkhorst® model FG-110C High Performance Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,18…9 mln/min at operating pressures between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
Accuracy (incl. linearity) (based on actual calibration)standard: ±0,5% Rd plus ±0,1%FS
(±0,8% Rd plus ±0,2% FS for ranges 3...5 mln/min;
±1% Rd plus ±1% FS for ranges < 3 mln/min)
Repeatability< 0,2 % RD
Turndown ratio1 : 150; in analog mode 1 : 50
Multi Gas/Multi Rangeembedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR available up to 100 bar.
Operating temperature max-10 ... 70 °C
Temperature sensitivityzero: < 0,02% FS/°C; span: < 0,025% Rd/°C
Pressure sensitivity< 0,15% Rd/bar typical N2;
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating (PN)100 bar g
Process connectionscompression type or face seal couplings
Sealsstandard: Viton®
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds
Weight0,5 kg
Ingress protectionIP40
Electrical properties
Power supply+15 ... 24 Vdc
Max. power consumption meter
Supply
15 V
24 V
at voltage I/O
69 mA
45 mA
at current I/O
92 mA
63 mA
Max. Power consumption controller
Supply
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
PROFIBUS DPadd 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINETadd 76 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT®add 66 mA (15 V supply) or 41 mA (24 V supply)
CANopen® / DeviceNet™add 48 mA (24 V supply)
Analog output0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus or FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
CEEMC 2014/30/EU, RoHS 2011/65/EU
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
EL-FLOW Prestige brochure

Manuals
Quick installation guide
Manual EL-FLOW Prestige

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
PROFIBUS DP
PROFINET
CANopen
Optional Bus and IO Configurations

Dimensional drawing
Dimensional Drawing FG-110C



Bronkhorst USA inc.

57 South Commerce Way
Suite 120
USA - Bethlehem, PA 18017 
Tel.  +1-610-866-6750
[email protected]

     
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