EL-FLOW Select F-110C

Digital Thermal Mass Flow Meter for Gases

  • Lowest gas flow rates
  • Compact design, small internal volume
  • High accuracy
  • Virtually pressure and temperature independent
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EL-FLOW Select F-110C

Gas Mass Flow Meters for lowest flow rates

Bronkhorst® model F-110C Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min at operating pressures between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus or FLOW-BUS protocols. The EL-FLOW® Select design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min max. 0,6…9 mln/min
Accuracy (incl. linearity) (based on actual calibration)±0,8% Rd plus ±0,2% FS for F-110C-005; ±2% FS for F-110C-002
Repeatability< 0,2 % RD
Turndown ratio1:50 (in digital mode up to 1:187,5)
Multi fluid capabilitystorage of max. 8 calibration curves; optional Multi Gas / Multi Range functionality up to 10 bar abs
Response time (sensor)FS < 3 mln/min: 2 sec; FS > 3 mln/min: 1…2 sec
Operating temperature max-10 +70 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity0,1 % RD
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy 2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable
Pressure rating (PN)100 bar abs
Process connectionscompression type or face seal couplings
Sealsstandard: Viton; options: EPDM, Kalrez (FFKM)
Weight0,4 kg
Ingress protectionIP40
Electrical properties
EtherCAT®2 x RJ45 modular jack (in/out)
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates
Environmental / EMCbar typical N2; 0,01% Rd/bar typical H2

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


EL-FLOW Select brochure
EL-FLOW Select flow range table

Quick installation guide EL-FLOW Select
Manual EL-FLOW Select

Hook-up diagrams
Analog IO - RS232
Optional Bus and IO Configurations

Dimensional drawings
Dimensional Drawing F-110C F-100D
Dimensions Digital Cases
Dimensions Adapters

Bronkhorst USA inc.

57 South Commerce Way
Suite 120
USA - Bethlehem, PA 18017 
Tel.  +1-610-866-6750
[email protected]

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