Bronkhorst

μ-FLOW L01

Ultra Low-Flow Thermal Liquid Mass Flow Meter

  • Fast and accurate measuring signal
  • Insensitive to mounting position
  • Very small internal volume (sensor: 1,5...33 μl)
  • Suitable for liquids with low boiling points
  • Analog, RS232 or fieldbus communication
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μ-FLOWL01

Liquid Mass Flow Meters for Ultra Low Flow Rates

Bronkhorst® model L01 Liquid Flow Meters (LFMs) are suited for precise measurement of flow ranges between 5…100 mg/h and 0,1...2 g/h at operating pressures up to 400 bar. The LFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

μ-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 5…100 mg/h
max. 0,1…2 g/h
(based on H2O)
Accuracy (incl. linearity) (based on actual calibration)± 2 % FS
Repeatability< 0,2 % FS (typical H2O)
Turndown ratio1:20 (5…100%)
Operating temperature5 … 50 °C
Temperature sensitivity± 0,2% FS/°C
Attitude sensitivitynegligible
Warm-up timeapprox. 10 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L/320;
other on request
Pressure rating (PN)400 bar abs
Process connections1/16” or 1/8” OD compression type; other on request
(<1 g/h we advise to use 1/16" only)
SealsMetal
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc +/-10%
Max. power consumption
Supply
15 V
24 V
at voltage I/O
100 mA
65 mA
at current I/O
120 mA
85 mA
extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male)
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male)
CANopen® / DeviceNet™5-pin M12-connector (male)
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
LIQUI-FLOW - µ-FLOW brochure
Manuals
Manual LIQUI-FLOW incl u-FLOW
Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations
Dimensional drawing
Dimensional drawing μ-FLOW L01