Semiconductor and LED lighting industry
Originally, Thermal Mass Flow Meters/Controllers were developped in
the 1970's for gas vapour deposition in semiconductor fabrication processes.
The Semicon market is still a huge market for suppliers of MFC's like Bronkhorst.
By listening to the requirements from this market and introducing new and
better products for gas, liquid and vapour delivery, Bronkhorst became
a major supplier to the Semiconductor, Flat Panel Display and LED Industry.
With metal sealed instruments, fast response MFC's, innovative direct liquid
injection systems and on-board fieldbus interfaces (Profibus, Profinet,
DeviceNet, Modbus, EtherCAT, etc.) Bronkhorst earned an excellent reputation
within this highly advanced and demanding market.
Application Notes & Market Brochures
Note on Supercritical Gas
(Wafer cleaning using supercritical CO2)
(Ultra) low flow Coriolis competence