EL-FLOW Prestige FG-201CSP (P-Insensitive)

High Performance Mass Flow Controller with Integrated Shut-Off Valve

  • Static and dynamic pressure correction
  • On-board gas conversion model (Multi-Fluid / Multi-Range)
  • 100 unique gases embedded
  • User configurable I/O functions
  • Integrated shut-off valve for extra efficiency or safety
  • Further advances in flow-signal processing
  • Highly stable flow control regime virtually impervious to process fluctuations
  • Advanced control valve design
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EL-FLOW PrestigeFG-201CSP (P-Insensitive)

Gas Mass Flow Controllers with Electrical Shut-Off Valves

Bronkhorst® model FG-201CSP High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,14…7 mln/min and 0,4…20 ln/min at operating pressures between vacuum and 10 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. Model FG-201CSP is equipped with an on-board pressure sensor. In combination with an incorporated gas database with physical properties, the instrument automatically compensates for inlet pressure variations. As a result, the accuracy and control stability will not be affected by these pressure changes. For extra efficiency or safety, the FG-201CSP features an integrated, electrically operated shut-off valve.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Technical specifications

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,14…7 mln/min
max. 0,4…20 ln/min
Accuracy (incl. linearity)
(based on actual calibration)
±0,5% Rd plus ±0,1%FS
Repeatability < 0,2% Rd
Turndown 1 : 150; in analog mode 1 : 50
Multi Gas/Multi Range embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases.
Settling time
(in control, typical)
fast: < 500 msec
standard: < 1 sec
slow: < 2 sec
Control stability ≤ ± 0,1% FS (typical for 1 ln/min N2)
Max. Kv-value 6,5 x 10-2
Operating temperature -10…70°C
Temperature sensitivity zero: < 0,02% FS/°C; span: < 0,025% Rd/°C
Pressure sensitivity < 0,02% Rd/bar N2 
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Attitude sensitivity max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time 30 min. for optimum accuracy
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating 10 bar (g)
Max. ΔP 5 bar dif.
Process connections compression type or face seal couplings
Seals standard: Viton®
options: EPDM, Kalrez® (FFKM) (N/C shut-off only)
Weight 1,5 kg
Ingress protection (housing) IP40
Electrical properties
Power supply +15…24 Vdc
Max. power consumption
(based on normally closed valve, pin 5 not used)
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
Shut-off valve (N/C) +24 Vdc, 3 W; using a shut-off control adapter reduces the power consumption
If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 76 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
CANopen® / DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus or FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™ 5-pin M12-connector (male);
EtherCAT®/PROFINET 2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS RJ45 modular jack
CE EMC 2014/30/EU, RoHS 2011/65/EU,

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


EL-FLOW Prestige brochure

Quick installation guide
Manual EL-FLOW Prestige
Manual Shutoff-Valve-Control-Adapter

Hook-up diagrams
Analog IO - RS232
Optional Bus and IO Configurations

Dimensional drawing
Dimensional Drawing FG-201CSP

Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
[email protected]

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