Bronkhorst

Which gases are embedded in the EL-FLOW® Prestige mass flow meter/controller?

Gas properties vary with temperature and pressure changes. The EL-FLOW Prestige thermal mass flow meter/controller uses the actual measured temperature (and pressure if applicable) for the real-time on-board calculation of the fluid properties. For this reason, the EL-FLOW Prestige mass flow meters and controllers have a database with gas properties embedded in the instrument (“Fluidat-On-Board”). The instrument embeds the following gases: 

Embedded gases in the EL-FLOW® Prestige thermal mass flow meter/controller

EL-FLOW® Prestige models built until Dec. 2018 EL-FLOW® Prestige models built from Jan. 2019
Formula Name Formula Name Formula Name
Air Air Air Air CH3Cl Chloromethane
Ar Argon Ar Argon CH3F Fluoromethane
C2F6 Freon-116 AsH3 Arsine CH4 Methane
C2H2 Acetylene B2H6 Diborane CH4S Methanethiol
C2H4 Ethene BCI3 Boron trichloride CH5N Aminomethane
C2H6 Ethane BF3 Boron trifluoride CHCl2F Dichlorofluoromethane
C3H6 #2 Propene C2CI2F4 #2 Freon-114 CHClF2 Chlorodifluoromethane
C3H8 Propane C2Cl3F3 Freon-113 CHF3 Freon-23
CH4 Methane C2ClF5 Freon-115 Cl2 Chlorine
Cl2 Chlorine C2F4 Perfluoroethene ClCN Cyanogen Chloride
CO Carbon monoxide C2F6 Freon-116 ClF3 Chlorine trifluoride
CO2 Carbon dioxide C2H2 Acetylene CO Carbon monoxide
H2 Hydrogen C2H2F2 #1 Freon-134 CO2 Carbon dioxide
H2S Hydrogen Sulfide C2H3Br Vinyl Bromide COCl2 Carbon oxychloride
He Helium C2H3Cl Chloroethene COF2 Carbonylfluoride
Kr Krypton C2H3F Fluoroethene COS Carbon Oxysulfide
N2 Nitrogen C2H4 Ethene CS2 Carbon disulfide
N2O Nitrous Oxide C2H4O #2 Epoxyethane D2 #1 Deuterium
NF3 Nitrogen trifluoride C2H5Cl Chloroethane F2 Fluorine
NH3 Ammonia C2H6 Ethane GeH4 Germane
NO Nitric Oxide C2H6O #1 Dimethyl ether H2 Hydrogen
O2 Oxygen C2H7N #2 Dimethylamine H2S Hydrogen Sulfide
SF6 Sulfur hexafluoride C2H7N #3 Monoethylamine H2Se Hydrogen Selenide
SiH4 Silane C2N2 Cyanogen HBr Hydrogen Bromide
    C3F8 Perfluoropropane HC1 Hydrogen Chloride
    C3H4 #1 Allene HCN Hydrogen Cyanide
    C3H4 #2 Methylacetylene He Helium
    C3H6 #1 Cyclopropane HF Hydrogen Fluoride
    C3H6 #2 Propene HI Hydrogen iodide
    C3H8 Propane Kr Krypton
    C3H9N #3 Trimethylamine MoF6 Molybdenum hexafluoride
    C4F8 Freon-C318 N2 Nitrogen
    C4H10 #1 n-Butane N2O Nitrous Oxide
    C4H10 #2 Isobutane Ne Neon
    C4H6 #3 1,3-Butadiene NF3 Nitrogen trifluoride
    C4H6 #4 1-Butyne NH3 Ammonia
    C4H8 #1 Cyclobutane NO Nitric Oxide
    C4H8 #2 1-Butene O2 Oxygen
    C4H8 #3 Butene (2-) (cis) OF2 Oxygen difluoride
    C4H8 #4 Butene (2-) (trans) PH3 Phosphine
    C4H8 #5 2-Methylpropene SF4 Sulfur tetrafluoride
    C5H12 #2 2,2-Dimethyl Propane SF6 Sulfur hexafluoride
    C5H12 #3 n-Pentane Si2H6 Disilane
    CBr2F2 Dibromodifluoromethane SiH2Cl2 Dichlorosilane
    CBrF3 Bromotrifluoromethane SiH4 Silane
    CCl2F2 Dichlorodifluoromethane SiHCl3 Trichlorosilane
    CCl3F Fluorotrichloromethane SO2 Sulfur dioxide
    CClF3 Chlorotrifluoromethane WF6 Tungsten hexafluoride
    CF4 Carbon tetrafluoride Xe Xenon
    CH3Br Bromomethane    

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Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
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