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FLEXI-FLOW Compact FF-C1x

가스용 컴팩트 질량 유량 & 압력 컨트롤러

  • 빠르고 안정적인 제어
  • On-board 가스 변환 모델
  • 22가지 특정 가스 내장
  • 멀티 파라메터 출력 : 질량 흐름, 온도 및 압력
  • USB-C 및 블루투스 통신
  • Namur NE107 상태 표시
Get a quote 다운로드 Datasheet
FLEXI-FLOW CompactFF-C1x

Mass Flow / Pressure Controllers for Low Gas Flows

FLEXI-FLOW Compact Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information. 

FLEXI-FLOW Compact Mass Flow / Pressure Controllers are currently available in 3 variants:

  • 'Preconfigured Advanced' (PA), turndown 1:500, flow + temperature + up- and downstream pressure, 4 flow ranges (FS, based on N2):
    Type FF-A500 - 500 mln/min
    Type FF-A2K0 - 2 ln/min
    Type FF-A5K0 - 5 ln/min
    Type FF-A20K - 20 ln/min
  • 'Preconfigured Standard' (PS), turndown 1:50, flow + temperature, 4 flow ranges (FS, based on N2):
    Type FF-S500 - 500 mln/min
    Type FF-S2K0 - 2 ln/min
    Type FF-S5K0 - 5 ln/min
    Type FF-S20K - 20 ln/min
  • 'Built-to-Order' (BtO), turndown 1:1000; free selection of ranges between 0,5 and 20 ln/min (FS, based on N2),
    Type FF-C10: flow + temperature
    Type FF-C11: flow + temperature + up- and downstream pressure;
    BtO models may also be used to configure multi-channel versions up to 8 channels.

기술 정보

Measurement / control system
Flow range (intermediate ranges available)min. 0…500 mln/min
max. 0…20 ln/min
(based on N2)
Pressure rangesFF-C10: not available / FF-C11: 0...17 bar(a)
정확도 (선형도) (실제 검교정 기반){$Bronkhorst.Products.UpTo$} ±0,5% Rd plus ±0,1% FS (N2/Air/O2);
for other gases add conversion uncertainty; see multi gas table;
RepeatabilityFlow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratioup to 1:1000
Max. operating pressure16 bar(g)
Multi Gas/Multi Rangeembedded gas data for 22 unique gases plus any mixture of these gases
Settling time (in control, typical)< 150 ms
Long term stability< 0,5% FS over period of 3 years; then < 0,2% FS per year
Control stability< ± 0,1% FS (typical for 1 ln/min N2)
Operating temperature0 … 50 °C
Storage / Transport conditions-20 … +80 °C, max. 95% RH (non-condensing)
Mountingany position, attitude sensitivity negligible
Temperature sensitivityFlow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC;
Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors±0,5% FS
Pressure sensitivitystandard: < 0,15% Rd/bar typical N2;
with pressure correction: typical factor 5 improved
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Leak-by through closed valvetypical < 1 x 10-4 mbar·l/s He
Mechanical parts
Instrument bodyAluminium or Stainless steel (selectable);
Material (wetted parts)aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality< 1,6 mu Ra (<0,8 mu Ra for stainless steel body)
Pressure rating (PN)16 bar(g) / 250 psig
Max. ΔP16 bar(d);
20 ln/min models: 5 bar (d)
Process connectionsdefault: BSPP female thread (ISO1179-1)
optional: compression type, push-in or face seal fittings
SealsFKM 51415; valve seat: FFKM with PI film;
for other materials contact factory
Weight200 g with Aluminium body, 300 g with SS 316 body;
add 50 g for Ethernet interface
Ingress protectionIP40
Electrical properties
Power supply24 Vdc ± 10%
Max. power consumption2,5 Watt (typical, in control);
add 0,9 Watt for EtherNet communication
Digital communicationModbus RTU or FLOW-BUS (selectable)
Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK
Support interfaceUSB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection9-pin D-sub (male)
CertificationCE / UKCA / KC
Electrical connection
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

도면 및 배선연결 정보 제품 페이지 우리의 웹사이트

Downloads

Brochures
FLEXI-FLOW brochure
Manuals
Manual FLEXI-FLOW
Quick installation guide FLEXI-FLOW
Mounting Instruction Compression Fittings
Mounting Instruction Push-in Fittings
Hook-up diagrams
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
Dimensional drawings
Solids 3D
FLEXI-FLOW Compact MFC-MFM


BRONKHORST KOREA Co. Ltd

경기도 화성시 동탄순환대로 830 SK
V1 Center 209호
대표자 : 헨드리크제지너스타펠
사업자등록번호 : 119-86-74469

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