Bronkhorst

LOW-ΔP-FLOW F-101D

낮은 차압 / 부식성 가스용 질량 유량계

  • 조금 큰 모세관 센서 (열식 bypass 센서)
  • 매우 낮은 차압
  • 습기 및 먼지에 상대적으로 민감도 낮음
  • 부식성 가스에 적합
  • 쉬운 퍼지(가스 제거)
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LOW-ΔP-FLOWF-101D

Thermal Mass Flow Meters for low pressure drop or corrosive gas applications

Bronkhorst® model F-101D Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,42…21 mln/min and 0,042…2,1 ln/min (N2-equivalent). The instruments are particularly suited for corrosive gases or applications with very low differential pressure (∆P). Compared to conventional instruments, LOW-∆P-FLOW meters have larger flow channels to minimize the risk of clogging, facilitate cleaning and purging, and cause lower pressure drop (the sensor only requires 0,5 to 5 mbar).

The integrated digital pc-board provides signal and fieldbus conversion as well as PID controller functionality for optional mass flow control by means of a (separately mounted) control valve. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.


기술 정보

Measurement / control system
Flow range (intermediate ranges available)min. 0,42…21 mln/min
max. 0,042…2,1 ln/min
(based on N2)
정확도 (선형도) (실제 검교정 기반)± 1 % FS
Repeatability< 0,2 % RD
Turndown ratio1:50 (2…100%)
Max. operating pressure10 bar g
Multi fluid capabilityStorage of max. 8 calibration curves
Response time (sensor)1 … 2 sec.
Operating temperature-10 … +70 °C
Mountinghorizontal
Temperature sensitivity< 0,1% FS/°C
Pressure sensitivity0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Warm-up time30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable;
other on request
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Weight0,5 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption meter
Supply
15 V
24 V
at voltage I/O
95 mA
65 mA
at current I/O
125 mA
85 mA
extra for fieldbus
<75 mA
<50 mA
Max. Power consumption controller
Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
extra for fieldbus
<75 mA
<50 mA
아날로그 출력0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
Electrical connection
아날로그/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out);
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

도면 및 배선연결 정보 제품 페이지 우리의 웹사이트

Downloads

Brochures
LOW-ΔP-FLOW Brochure
Manuals
General manual digital instruments
Operating instructions digital instruments
Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations
Dimensional drawing
Dimensional Drawing F-101D


BRONKHORST KOREA Co. Ltd

경기도 화성시 동탄순환대로 830 SK
V1 Center 209호
대표자 : 헨드리크제지너스타펠
사업자등록번호 : 119-86-74469

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