EL-PRESS Metal Sealed P-702CM (P1-control)

메탈씰 역방향 압력 컨트롤러

역방향 압력 제어 (upstream 압력 "P1" 제어)
장기간 (대기에 대한) 리크 기밀성이 보장되는 특허받은 메탈-메탈씰 구조
가스 접촉 부품의 높은 표면 품질
클린룸 조립
절대 압력 및 게이지 압력
높은 정확도, 높은 재연성
입증된 컴팩트한 관류 디자인
컴팩트한 디자인의 온보드 PID 컨트롤러 및 다이렉트 작동 제어 밸브
아날로그, RS232 및 필드버스 통신

Metal-Sealed Back Pressure Controllers

Bronkhorst^® model P-702CM Back Pressure Transducers (EPCs) are designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The P-702CM is suited for precise measurement and control of pressure ranges between 20…100 mbar and 12,8…64 bar absolute or 4,2...21 bar gauge. The EPC has a well-proven compact thru-flow design and includes a diaphragm type piezo-resistive pressure sensor, a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for pressure control by means of integrated control valve.

In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols

기술 정보

Measurement / control system







절대 압력 센서	Code: 350A - Ranges (FS): 100 ... 350 mbara - P-max: 1,0 bara - Burst pressure: 1,4 bara Code: 1K1A - Ranges (FS): 0,35 ... 1,1 bara - P-max: 3,1 bara - Burst pressure: 4,2 bara Code: 6K0A - Ranges (FS): 1,1 ... 6 bara - P-max: 10,5 bara - Burst pressure: 14 bara Code: 21KA - Ranges (FS): 6 ... 21 bara - P-max: 62 bara - Burst pressure: 84 bara Code: 64KA - Ranges (FS): 21 ... 64 bara - P-max: 100 bara - Burst pressure: n.a.
Relative pressure sensors	Code: 350R - Ranges (FS): 100 ... 350 mbarg - P-max: 1,0 barg - Burst pressure: 1,4 barg Code: 1k1R - Ranges (FS): 0,35 ... 1,1 barg - P-max: 3,1 barg - Burst pressure: 4,2 barg Code: 6K0R - Ranges (FS): 1,1 ... 6 barg - P-max: 10,5 barg - Burst pressure: 14 barg Code: 21KR - Ranges (FS): 6 ... 21 barg - P-max: 62 barg - Burst pressure: 84 barg


정확도 (선형도 및 이력현상 포함)	± 0,5 % FS



Repeatability	< 0,1 % RD










Pressure rangeability	measurement: 1 : 50 (2…100%) control: 1 : 5 (with flow range 1 : 50)












Control stability	≤ ± 0,05 % FS (typical for 1 slm N₂ at specified process volume)


Operating temperature	-10 … +50 °C up to +70°C on request



Temperature sensitivity	0,1% FS/°C









Max. Kv-value	6,6 x 10^-2


Leak integrity, outboard	< 2 x 10^-11 Pa.m³/s He
Leak-by through closed valve	< 10^-5 Pa.m³/s He


Attitude sensitivity	may be mounted in any position
Warm-up time	negligible

Mechanical parts







Material (wetted parts)	stainless steel 316L or comparable








Process connections	1/4" face seal couplings

Seals	outer seals: metal-to-metal (no O-rings); valve seat: Kalrez® (FFKM); option: Viton®
Weight	0,7 kg
Ingress protection	IP40

Electrical properties

Power supply

+15 … 24 Vdc

Max. power consumption

Supply
15 V
24 V

at voltage I/O
290 mA
200 mA

at current I/O
320 mA
215 mA

extra for fieldbus
<75 mA
<50 mA

아날로그 출력

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS

Electrical connection
아날로그/RS232	9-pin D-connector (male);



PROFIBUS DP	bus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™	5-pin M12-connector (male);

FLOW-BUS/Modbus-RTU/ASCII	RJ45 modular jack

Modbus TCP / EtherNet/IP / POWERLINK	2 x RJ45 modular jack (in/out);



EtherCAT®/ PROFINET	2 x RJ45 modular jack (in/out);

Control valve options

External actuator options to be connected to the controller

Certification for hazardous areas

Approvals / certificates

Note: The measuring cell of the pressure sensor is separated from the external pressure by a thin, sensitive stainless steel diaphragm, and the sealed off cavity between diaphragm and cell is filled with oil. Since the standard oil filling is flammable, Bronkhorst advises to take precautions when oxygen or any other explosive fluid is used.

Downloads

Brochures
Metal Sealed Mass Flow and Pressure brochure

Manuals
Manual EL-PRESS
Quick Start Guide EL-PRESS Metal Sealed

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations

Dimensional drawing
P-702CM

EL-PRESS Metal Sealed P-702CM (P1-control)

Metal-Sealed Back Pressure Controllers

기술 정보

Downloads

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