Bronkhorst

EL-FLOW Metal Sealed F-111CM

Metal Sealed Mass Flow Meter for Gases

  • Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
  • Electropolished wetted parts
  • Cleanroom assembled
  • High accuracy, excellent repeatability
  • Multi Gas / Multi Range functionality (option)
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EL-FLOW Metal SealedF-111CM

Metal Sealed Gas Mass Flow Meters

Bronkhorst® model F-111CM Mass Flow Meters (MFMs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-111CM is suited for precise measurement of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N2) at operating pressures between vacuum and 1500 psig (100 bar).

EL-FLOW® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,12…6 mln/min
max. 1…50 ln/min
Accuracy (incl. linearity)
(based on actual calibration)
±0,5% Rd plus ±0,1% FS
Repeatability < 0,2% Rd
Turndown 1 : 50 (in digital mode up to 1 : 150)
Max. operating pressure 1500 psig (100 bar abs)
Temperature sensitivity zero: < 0.05% FS/°C; span: < 0.05% Rd/°C
Pressure sensitivity < 0,1% Rd/bar typical N2;
< 0,01% Rd/bar H2
Warm-up time 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
General performance
Operating temperature -10…+50°C;
up to +70°C on request
Leak integrity(outboard) < 2 x 10-11 Pa.m3/s He
Leak-by through closed valve < 10-5 Pa.m3/s He
Attitude sensitivity may be mounted in any position
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable
Process connections 1/4” face seal male
Outer seals metal-to-metal (no rings)
Weight 0,6 kg
Ingress protection (housing) IP40
Electrical properties
Power supply +15…24 Vdc
Max. power consumption
(pin 5 not used)
Supply
15 V
24 V
at voltage I/O
95 mA
65 mA
at current I/O
125 mA
85 mA
If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 77 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/PROFINET 2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS RJ45 modular jack

Technical specifications and dimensions subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the productpage on our website

Downloads

Brochures
Metal Sealed Mass Flow and Pressure brochure

Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
Optional Bus and IO Configurations
PROFIBUS DP
PROFINET

Dimensional drawing
Dimensional drawing F-111CM