Bronkhorst

Theory and advantages of 'CEM' Vapour Control

At room temperature the liquid (precursor fluid for chemical reactions or water for humidification purposes) is drawn from a container with an inert gas blanket, or membrane, and measured by a liquid mass flow meter. The required flow rate is controlled to the setpoint value by a control valve (C) forming an integral part of the patented liquid flow and carrier gas mixing valve (M). The then formed mixture is subsequently led into the evaporator to achieve total evaporation (E). This explains the abbreviation of CEM viz.: Control - Evaporation - Mixing, the 3 basic functions of Bronkhorst's Liquid Delivery System.
A complete system also incorporates a readout/control unit, including power supply, for operation of the CEM-system devices.

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CEM: Controlled Evaporation Mixing

  1. Fast evaporation
    Precursor only short period of time at higher temperature
    Well-suited for less stable precursors
  2. Pressure and temperature in piping are of no importance
  3. Precursor dosing via liquid flow controller
  4. Precursor in a container at low temperature
 

Find your vapour control system

Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
[email protected]

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