Bronkhorst

EL-FLOW Select F-200CV

氣體數字熱質式質量流量控制器

  • 最低氣體流速
  • 設計緊湊,內部體積小
  • 高精度和再現性
  • 幾乎與壓力和溫度無關
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EL-FLOW Select F-200CV

Gas Mass Flow Controllers for lowest flow rates

Bronkhorst® model F-200CV Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min at operating pressures between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.

EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)±0,8% Rd plus ±0,2% FS F-200CV-005;
±2% FS for F-200CV-002
Repeatability< 0,2 % RD
Turndown ratioup to 1:187,5 (1:50 in analog mode)
Multi fluid capabilityStorage of max. 8 calibration curves
Settling time (in control, typical)2 … 4 sec.
Control stability≤ ± 0,1 % FS
Operating temperature-10 … +70 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity< 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable
Pressure rating (PN)64 bar abs
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Weight0,6 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
EL-FLOW Select brochure
EL-FLOW Select flow range table
Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select
Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations
Dimensional drawing
Dimensional drawing F-200CV-F-210CV-F-200DV
Dimensions Digital Cases
Dimensions Adapters
Solids 3D
F-200CV EL-FLOW


台灣柏朗豪斯特股份有限公司

新竹縣竹北市台元街三十八號四樓之一、二
Rm. 1 & 2, 4F., No.38, Taiyuan St., Zhubei City, Hsinchu County 302, Taiwan (R.O.C.)
電話 +886 3-5600-518
[email protected]

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