• 実績のある直接インラインCTAセンサ(バイパスなし)
  • 小型・堅牢設計(IP65、防塵耐噴流)
  • 低圧損用途向け
  • 比較的ダスト・ミストの影響を受けにくい
  • オプションの内蔵TFTディスプレイ
  • 優れた価格/機能比
お見積り依頼 Downloads Datasheet

IP65 Mass Flow Controllers for high gas flow at Low-ΔP

Bronkhorst® model D-6471/DR3 Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 6…300 ln/min and 60…3000 ln/min at operating pressures between 30 mbar and 5 bar(g). The MFC consists of a proven inline thermal (CTA) mass flow sensor, an advanced, innovative control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.

The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Note: Please respect our instructions regarding inlet pressure and straight pipe run at the inlet and the outlet of the instrument (see datasheet).

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 6…300 ln/min
max. 60…3000 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 1.0% RD plus ± 0.5% FS (at calibration conditions)
Repeatability< ± 0,2 %FS
Turndown ratioup to 1:50
Type of gasesall gases, compatible with chosen materials
Settling time (in control, typical)approx. 2 sec.
Control stability< ± 0,2% FS typical
Operating temperature0…50°C
Temperature sensitivity< ± 0,1% Rd/°C (Air)
Max. Kv-value3,0
Leak integrity, outboard1 x 10-6 mbar.l/s He
Attitude sensitivityat 90° deviation from horizontal 0,2% at 1 bar typical N2
Warm-up time30 min. for optimum accuracy, within 30 seconds for accuracy < ± 4% FS
Mechanical parts
Sensorstainless steel SS316 (AISI 316L)
Instrument bodyaluminium EN AW-6082-T6
Pressure rating (PN)5 bar(g)
Min. ΔP≥ 30 mbar(d);
note: an optional flow straightener will generate additional pressure difference.
Max. ΔP2 bar(d)
Process connections1" BSPP (G1"; ISO 1179-1 cavities),
Note: please apply straight inlet/outlet run for optimal performance;
factory mounted flow straightener available as an option
SealsFKM / Viton®;
Membrane: fiber (PET) reinforced FKM
Weight2 kg
Ingress protectionIP65
Electrical properties
Supply voltage+15…24 Vdc ±10%
Max. power consumption
15 V
24 V
at voltage I/O
102 mA
66 mA
at current I/O
125 mA
84 mA
add. for fieldbus
80 mA
50 mA
add. for display
102 mA
66 mA
Analog output0…5 (10) Vdc, min. load impedance > 2 kΩ; 0 (4)…20 mA (sourcing),
max. load impedance < 375 Ω
Analog setpoint0…5 (10) Vdc, min. load impedance > 100 kΩ; 0 (4)…20 mA,
load impedance ~250 Ω
Digital communicationstandard: RS232
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
PROFIBUS DPbus: 5-pin M12 (female)
power: 8 DIN (male)
CANopen® / DeviceNet™5-pin M12-connector (male)
FLOW-BUS/Modbus-RTU/ASCII5-pin M12-connector (male)
Power/Analog/RS232/RS4858 DIN (male)
PROFINETbus: 2 x 5-pin M12-connector (male)
power: 8 DIN (male)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


MASS-STREAM D-6471-DR3 Datasheet
Manual MASS-STREAM D-6400 instruments
Manual MASS-STREAM D-6400 display
Quick installation guide D-6400 series
Hook-up diagrams
Analog I-O RS232
PROFIBUS DP with 5-pin M12 connector
Industrial Ethernet
Optional Bus and I-O Configurations
Dimensional drawings
Dimensional Drawing D-6471/DR3
Dimensions Mass-Stream fieldbus cases (option)
Dimensions BSPP ISO 1179-1 adapters (option)
Solids 3D


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