Semiconductor, Flat Panel Display and LED lighting industry

Originally, Thermal Mass Flow Meters and Controllers were developed in the 1970's for gas vapour deposition in semiconductor fabrication processes. By listening to the requirements from this market and introducing new and better products for gas, liquid and vapour delivery, Bronkhorst became a major supplier to the Semiconductor, Flat Panel Display and LED Industry. For chemical vapour deposition (CVD), spray coating for flat-panel displays (FPD) and atomic layer deposition (ALD) processes we can offer metal sealed flow instruments for direct liquid injection systems.

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Examples of applications

  • Deposition of protective layers on wafers before (laser-) dicing
  • Metal Organic Chemical Vapor Deposition (MOCVD)
  • Atomic Layer Deposition (ALD)
  • Dosing and controlling supercritical fluids (e.g. Supercritical CO2 cleaning)
  • Spray coating in flat-panel displays (FPD)


Supercritical fluid measurement and control

Fluids like carbon dioxide (CO2) are difficult to measure when they move towards the inter-phase stage between being a liquid and a gas. Coriolis Mass Flow Meters are recommended for this application.

View application note

Other markets

Bronkhorst instruments are used for numerous applications in many different markets. They can be found in laboratories, universities, industry, production and pilot plants and even in areas or installations with risk of explosion. A substantial part of the produced instruments is integrated in manufacturing machines or equipment of so called OEM-customers (Original Equipment Manufacturers).


Tel.  03-3645-1371

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