FF-C0x

Mass Flow / Pressure Controllers for Low Gas Flows

FLEXI-FLOW Compact models FF-C00 and FF-C01 Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…5 ml_n/min and 0…200 ml_n/min at operating pressures between 0,8 and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique, internationally patented TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.

FF-C0x Mass Flow / Pressure Controllers are Built-to-Order (BtO) and feature a turndown of 1:1000 and a free selection of ranges between 5 and 200 ml_n/min (FS, based on N₂). They are currently available in 2 variants:

Type FF-C00: flow + temperature
Type FF-C01: flow + temperature + up- and downstream pressure

These instruments may also be used to configure multi-channel versions up to 8 channels.

Spécifications techniques

Système de mesure / régulation
Gamme de débit (gammes intermédiaires disponibles)	min. 0…5 ml_n/min max. 0…200 ml_n/min (basée sur N₂)





Gammes de pression	FF-C00: pas disponible / FF-C01: 0...17 bar(a)



Précision (Linéarité incl.) (basée sur étalonnage réel)	Up to ±0,5% Rd plus ±0,1% FS (N₂/Air/O₂) pour les autres gaz, ajouter l'incertitude de conversion; voir table multi-gaz;




Répétabilité	Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS
Rangeabilité	up to 1:1000; ≤ 20 mln/min: up to 1:500


Pression max. de fonctionnement	16 bar(g)










Multi-gaz/Multi-gammes	embedded gas data for 22 unique gases plus any mixture of these gases




Temps de réponse (en régulation, standard)	< 150 ms
Stabilité à long terme	< 0,5% FS over period of 3 years; then < 0,2% FS per year


Stabilité de régulation	< ± 0,1% FS (typical for 1 l_n/min N₂₎


Température de fonctionnement	0 … 50 °C
Conditions de stockage / transport	-20 … +80 °C, max. 95% RH (non-condensing)

Montage	any position, attitude sensitivity negligible
Sensibilité à la température	Flow sensor: zero 0,015% FS/ºC; span 0,05% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Précision de la température	± 0,2 ºC (instrument body temperature)
Précision des capteurs de pression	±0,5% FS






Sensibilité à la pression	standard: < 0,15% Rd/bar typical N₂; with pressure correction: typical factor 5 improved



Etanchéité, vers l'extérieur	tested < 2 x 10^-9 mbar l/s He
Fuite par la vanne fermée	typical < 1 x 10^-4 mbar·l/s He; < 5 x 10^-5 mbar·l/s He for FS flow rates ≤ 50 mln/min

Parties mécaniques

Corps de l'instrument	Aluminium or Stainless steel (selectable)





Matériau (pièces en contact avec le fluide)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Qualité état de surface	< 1,6 mu Ra

Pression (PN)	16 bar(g) / 250 psig



ΔP max.	16 bar(d); 20 ln/min models: 5 bar (d)

Raccords de process	1/8" BSPP female thread; couplings to be ordered separately

Joints	FKM 51415; valve seat: FFKM with PI film for other materials contact factory
Poids	225 g with Aluminium body, 325 g with SS 316 body; add 50 g for Ethernet interface
Protection IP	IP40

Propriétés électriques

Alimentation électrique	24 Vdc ± 10%


Consommation d'électrique max.	2,5 Watt (typical, in control); add 0,9 Watt for EtherNet communication















Communication numérique	Modbus RTU or FLOW-BUS (selectable) Optional: PROFINET, EtherCAT, Modbus-TCP, Ethernet/IP or POWERLINK







Interface de support	USB-C port for easy setup; Optional Bluetooth connection for monitoring


Raccordement électrique	9-pin D-sub (male)
Certification	CE / UKCA / KC

Raccordement électrique

Options vanne de régulation

Options actionneur externe à connecter au régulateur

Certification pour les zones à risque d'explosion

Certifications / certificats

Downloads

Brochures
FLEXI-FLOW Compact brochure

Manuals
Manual FLEXI-FLOW Compact
Quick Start Guide FLEXI-FLOW Compact
Mounting Instruction Compression Fittings
Mounting Instruction Push-in Fittings

Hook-up diagrams
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
FLEXI-FLOW Compact Ethernet

Dimensional drawings
Dimensional drawing FF-C0x

FLEXI-FLOW Compact FF-C0x

Mass Flow / Pressure Controllers for Low Gas Flows

Spécifications techniques

Related products