EL-FLOW Prestige FG-200CV


  • オンボードガスコンバージョンモデル(マルチフルード/マルチレンジ)
  • 約100種のガスデータ内蔵
  • カスタマイズ可能なI/Oオプション
  • 流量/信号処理技術の更なる進化
  • プロセス変動の影響を受けにくい非常に安定した流量制御
  • 先進的なバルブ設計
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EL-FLOW PrestigeFG-200CV

Gas Mass Flow Controllers for lowest flow rates

Bronkhorst® model FG-200CV High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 mln/min and 0,18…9 mln/min at operating pressures between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)standard: ±0,5% Rd plus ±0,1%FS
(±0,8% Rd plus ±0,2% FS for ranges 3…5 mln/min;
±1% Rd plus ±1% FS for ranges < 3 mln/min)
Repeatability< 0,2 % RD
Turndown ratio1:150 (1:50 in analog mode)
Multi Gas/Multi Rangeembedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR functionality available up to 64 bar.
Settling time (in control, typical)< 2 sec.
Control stability≤ ± 0,1 % FS (typical for 1 ln/min N2)
Operating temperature-10 … 70 °C
Temperature sensitivityzero: < 0,02% FS/°C; span: < 0,025% Rd/°C
Pressure sensitivity<0,15% Rd/bar typical N2;
< 0,02% Rd/bar N2 (incl. pressure correction option)
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 1% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating (PN)64 bar g
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
valve seat: FFKM with PI film
Weight0,7 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
extra for fieldbus
<75 mA
<50 mA

(based on normally closed valve, pin 5 not used)
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
CertificationCE / UKCA
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
IEC 61010-1IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


EL-FLOW Prestige brochure
Quick installation guide
Manual EL-FLOW Prestige
Hook-up diagrams
Analog IO - RS232
Optional Bus and IO Configurations
Dimensional drawing
Dimensional Drawing FG-200CV - FG-210CV
Solids 3D


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