D-6460A MFM


  • 実績のある直接インラインCTAセンサ(バイパスなし)
  • 小型・堅牢設計(IP65、防塵耐噴流)
  • 低圧損
  • 比較的ダスト・ミストの影響を受けにくい
  • オプションの内蔵TFTディスプレイ
お見積り依頼 Downloads Datasheet
MASS-STREAMD-6360A &<br />D-6460A MFM

Compact IP65 Mass Flow Meters for medium flow rates of gases

Bronkhorst® models D-6360A and D-6460A Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 1…50 ln/min and 5…500 ln/min at operating pressures between vacuum and 20 bar. The MFM consists of a proven inline thermal (CTA) mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.

The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 1…50 ln/min
max. 5…500 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 1,0 % RD plus ± 0.5% FS (at calibration conditions)
Repeatability< 0,2 % FS
Turndown ratioup to 1:100
Type of gasesalmost all gases, compatible with chosen materials
Response time (sensor)approx. 0,9 sec.
Operating temperature0 … 50 °C
Storage / Transport conditionswith display : 0 … 50 °C, max. 95% RH (non-condensing);
without display : -20 … +80 °C, max. 95% RH (non-condensing)
Temperature sensitivityD-63xx : ±0,2% Rd/°C (Air)
D-64xx : ±0,1% Rd/°C (Air)
Pressure sensitivity± 0,3% Rd/bar typical (Air)
Leak integrity, outboardtested < 2 x 10-8 mbar l/s He
Attitude sensitivityat 90° deviation from horizontal max. error 0,2 % at 1 bar typical N2
Warm-up time30 min. for optimum accuracy,
within 30 seconds for accuracy ±4% FS
Mechanical parts
SensorStainless steel SS 316 (AISI 316L)
Instrument bodyStainless steel SS 316
Sieves and ringsStainless steel SS 316
Pressure rating (PN)20 bar g
Process connectionsG1/2" (D-63xx : RP-type cavity / D-64xx : ISO1179-1 cavity) /
compression type or face seal (VCR/VCO) couplings
Sealsstandard: Viton®; options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds
WeightAluminium: 1,1 kg
Stainless steel: 1,6 kg
Ingress protectionIP65
Electrical properties
Power supply+15 … 24 Vdc ±10%
Max. power consumption
15 V
24 V
Basic model
115 mA
85 mA
Add. for fieldbus
80 mA
50 mA
Add. for display
30 mA
20 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
Analog/RS2328 DIN (male);
PROFIBUS DPbus: 5-pin M12 (female);
power: 8 DIN (male)
CANopen® / DeviceNet™5-pin M12 (male)
Modbus RTU / FLOW-BUS5-pin M12 (male)
Modbus TCP / EtherNet/IP / POWERLINKbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
EtherCAT®/ PROFINETbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male)
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


MASS-STREAM D-6300 Brochure
MASS-STREAM D-6400 Brochure
Manual MASS-STREAM D-6300 instruments
Manual MASS-STREAM D-6300 display
Manual MASS-STREAM D-6400 instruments
Manual MASS-STREAM D-6400 display
Quick installation guide D-6400 series
Hook-up diagrams
Analog I-O RS232
PROFIBUS DP with 5-pin M12 connector
Industrial Ethernet
Optional Bus and I-O Configurations
Dimensional drawings
Mass-Stream fieldbus cases (option)
Dimensions Mass-Stream adapters (option)
Solids 3D


Tel.  03-3645-1371

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