EL-PRESS Metal Sealed P-502CM


  • 特許取得済のメタルtoメタルシール構造による長期間のリークタイト性(外部リーク)
  • 中接触部品の高い表面品質
  • クリーンルームにて組み立て
  • 絶対圧力 / ゲージ圧力計(いずれか選択)
  • 高精度、優れた繰り返し性
  • 実績のあるコンパクトなスルーフロー構造
  • 圧力制御のためのオンボードPIDコントローラ(オプション)
  • アナログ入出力・デジタルRS232/フィールドバス通信
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EL-PRESS Metal SealedP-502CM

Metal-Sealed Digital Electronic Pressure Meters

Bronkhorst® model P-502CM Electonic Pressure Transducers (EPTs) are designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The P-502CM is suited for precise measurement of pressure ranges between 2…100 mbar and 1,28…64 bar absolute or 0,42...21 bar gauge. The EPT has a well-proven compact thru-flow design and includes a diaphragm type piezo-resistive pressure sensor, a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional pressure control by means of a separately mounted control valve.

In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Absolute pressure sensorsCode: 350A - Ranges (FS): 100 ... 350 mbara - P-max: 1,0 bara - Burst pressure: 1,4 bara
Code: 1K1A - Ranges (FS): 0,35 ... 1,1 bara - P-max: 3,1 bara - Burst pressure: 4,2 bara
Code: 6K0A - Ranges (FS): 1,1 ... 6 bara - P-max: 10,5 bara - Burst pressure: 14 bara
Code: 21KA - Ranges (FS): 6 ... 21 bara - P-max: 62 bara - Burst pressure: 84 bara
Code: 64KA - Ranges (FS): 21 ... 64 bara - P-max: 100 bara - Burst pressure: n.a.
Relative pressure sensorsCode: 350R - Ranges (FS): 100 ... 350 mbarg - P-max: 1,0 barg - Burst pressure: 1,4 barg
Code: 1k1R - Ranges (FS): 0,35 ... 1,1 barg - P-max: 3,1 barg - Burst pressure: 4,2 barg
Code: 6K0R - Ranges (FS): 1,1 ... 6 barg - P-max: 10,5 barg - Burst pressure: 14 barg
Code: 21KR - Ranges (FS): 6 ... 21 barg - P-max: 62 barg - Burst pressure: 84 barg
Accuracy (incl. linearity and hysteresis)standard: ± 0,5 % FS
Repeatability< 0,1 % RD
Pressure rangeability1:50 for pressure meter;
1 : 20 for P2-control; 1 : 5 for P1-control
Response time (sensor)2 msec
Operating temperature-10 … +50 °C
up to +70°C on request
Temperature sensitivity0,1% FS/°C
Leak integrity, outboard< 2 x 10-11 Pa.m3/s He
Attitude sensitivitymay be mounted in any position
Warm-up timenegligible
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable
Process connections1/4" face seal couplings
Sealsmetal-to-metal (no rings)
Weight0,6 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption meter
15 V
24 V
at voltage I/O
95 mA
65 mA
at current I/O
125 mA
85 mA
extra for fieldbus
<75 mA
<50 mA
Max. Power consumption controller
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out);
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

Note: The measuring cell of the pressure sensor is separated from the external pressure by a thin, sensitive stainless steel diaphragm, and the sealed off cavity between diaphragm and cell is filled with oil. Since the standard oil filling is flammable, Bronkhorst advises to take precautions when oxygen or any other explosive fluid is used.

For dimensional drawings and hook-up diagrams please visit the product page on our website


Metal Sealed Mass Flow and Pressure brochure
Quick Start Guide EL-PRESS Metal Sealed
Hook-up diagrams
Analog IO - RS232
Optional Bus and IO Configurations
Dimensional drawing


Tel.  03-3645-1371

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