Bronkhorst

EL-FLOW Prestige FG-111B

High Performance Mass Flow Meter for Gases

  • On-board gas conversion model (Multi-Fluid / Multi-Range)
  • User configurable I/O functions
  • Significantly reduced power consumption
  • Further advances in flow-signal processing
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EL-FLOW PrestigeFG-111B

Gas Mass Flow Meters for low flow rates

Bronkhorst® model FG-111B High Performance Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,14…7 mln/min and 0,4…20 ln/min at operating pressures between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Accuracy (incl. linearity)
(based on actual calibration)
±0,5% Rd plus ±0,1%FS
Repeatability < 0,2% Rd
Turndown 1 : 150; in analog mode 1 : 50
Multi Gas/Multi Range gases embedded gas data for Air, N2, Ar, H2, O2, CO, CO2, He, CH4, SiH4, NH3, C2H2, C2H4, C2H6, Kr, C3H6 #2 (propene), C2F6, C3H8, NF3, N2O, H2S, Cl2, SF6, NO, Xe, plus any mixture of maximum 5 of these gases.
Operating temperature -10…70°C
Temperature sensitivity zero: < 0,02% FS/°C; span: < 0,025% Rd/°C
Pressure sensitivity < 0,15% Rd/bar typical N2;
< 0,02% Rd/bar N2 (incl. pressure correction option)
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Attitude sensitivity max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time 30 min. for optimum accuracy
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating 100 bar abs
Process connections compression type or face seal couplings
Seals standard: Viton®
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds
Electrical properties
Power supply +15…24 Vdc
Max. power consumption Meter Supply
15 V
24 V
at voltage I/O
69 mA
45 mA
at current I/O
92 mA
63 mA
Max. power consumption Controller (controllers based on normally closed valve, pin 5 not used) Supply
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 76 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/PROFINET 2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS RJ45 modular jack
CE EMC 2014/30/EU, RoHS 2011/65/EU,
IEC 61010-1 2010
Ingress protection (housing) IP40

Technical specifications and dimensions subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the productpage on our website

Downloads

Brochures
EL-FLOW Prestige brochure

Manuals
Quick installation guide
Manual EL-FLOW Prestige

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
PROFIBUS DP
PROFINET
Optional Bus and IO Configurations

Dimensional drawing
Dimensional Drawing FG-111B


Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
info@bronkhorst.com

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