We offer the widest product range of low-flow mass flow meters on the market. Numerous styles of both standard and bespoke instruments can be offered for applications in laboratory, machinery, industry and hazardous areas.
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Bronkhorst instruments are used for numerous applications in many different markets. In this section you will find an overview of the main markets for our equipment, illustrated with some typical examples of applications.
Are you looking for technical documentation, are you interested to learn more about the measuring principles of Bronkhorst products, or you do want to get in contact with a Bronkhorst Service Engineer? This section will guide you to the relevant service & support topics.
Bronkhorst High-Tech BV the leaders in Mass Flow Meter / Mass Flow Controller technology for gases and liquids, Pressure Controllers and Evaporation Systems.
In vacuum deposition equipment mass flow controllers are used for the supply of gases. Bronkhorst newest flexible gas flow controller (FLEXI-FLOW) is an excellent choice for vacuum deposition processes by reactive sputtering, due to its fast response. It reaches setpoints within 150 milliseconds. The flow controller has a large dynamic flow range suitable to control gas flows from 0,5 mln/min up to 20 ln/min, which largely accommodates for the requirements of reactive sputtering.
Reactive sputtering is a layer deposition technique where sputtered particles react with a gas that is introduced to the sputtering chamber. To this end, high-energy argon bombards a target, usually a plate of metal such as aluminium, releasing a vapour of sputtered metal particles. They react with the supplied reactive gases, typically oxygen or nitrogen, allowing very thin ceramic layers to be deposited on glass, silicon wafers, metal or polymer. Reactive sputtering is used for applying coatings for anti-reflection, hardening, anti-wear, anti-corrosion, etc. Mass flow controllers play a highly relevant role in the supply of gases.
In vacuum deposition technology, fast flow control is essential. Each second saves time, saves energy, resulting in a better efficiency of the deposition equipment. The gas flows need to be supplied with a large dynamic flow range, in a reproducible way and with long-term stability.
The FLEXI-FLOW mass flow controller reaches 150 msec response time without overshoot. This way, we can meet the requirements of vacuum coating customers that need multi-channel flow solutions offering stable and fast flow control in combination with shut-off functionality.
When the sputter system observes that the thickness or transparency is deviating, it corrects the deposition process by adjusting the gas flows. Therefore, a very fast flow control is desired with a response in the 150-millisecond range.
The FLEXI-FLOW mass flow controller can do this. In case there are variations in inlet pressure, the gas flow controller keeps the flow at the setpoint as responsive as possible. When there are changes in the reactor chamber, the flow controller receives a new setpoint. This way, fast response to new setpoints results in less waste and less rejected products.
A shut-off valve can be integrated to minimise leakage to the vacuum chamber in the phase of vacuuming - especially useful in ultra-high vacuum reactors.
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