Bronkhorst

EL-FLOW Select F-110C

Digital Thermal Mass Flow Meter for Gases

  • Lowest gas flow rates
  • Compact design, small internal volume
  • High accuracy
  • Virtually pressure and temperature independent
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EL-FLOW Select F-110C

Gas Mass Flow Meters for lowest flow rates

Bronkhorst® model F-110C Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min at operating pressures between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus or FLOW-BUS protocols. The EL-FLOW® Select design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,6…9 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)±0,8% Rd plus ±0,2% FS for F-110C-005;
±2% FS for F-110C-002
Repeatability< 0,2 % RD
Turndown ratio1:50 (in digital mode up to 1:187,5)
Multi fluid capabilitystorage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs
Response time (sensor)FS < 3 mln/min: 2 sec;
FS > 3 mln/min: 1…2 sec
Operating temperature-10… +70 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity< 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable
Pressure rating (PN)100 bar abs
Process connectionscompression type or face seal couplings
Sealsstandard: Viton®; options: EPDM, Kalrez® (FFKM)
Weight0,4 kg
Ingress protectionIP40
Electrical properties
Digital communicationstandard: RS232;
Options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
EL-FLOW Select brochure
EL-FLOW Select flow range table

Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
Optional Bus and IO Configurations
PROFIBUS DP
PROFINET
CANopen

Dimensional drawings
Dimensional Drawing F-110C F-100D
Dimensions Digital Cases
Dimensions Adapters


BRONKHORST (UK) Ltd

1 Kings Court
Willie Snaith Road
Newmarket Suffolk CB8 7TG
Tel. +44 1223 833222
[email protected]

      
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