How is the gas flow controlled?
For these applications Bronkhorst offers mass flow controllers, based on reliable and accurate capillary bypass technology and valve technology, which can achieve a dynamic flow range of up to 1 : 200, providing the low and high flow rates required for the growth process.
Mass flow controllers which are built with capillary bypass technology have a tube-shaped flow sensor inside that is positioned parallel – in bypass – with the main flow path. There is an accurate split of gas flow into the flow sensor and the main flow path, see picture [flow sensor used in the capillary bypass technology]. This particular technology enables reliable and accurate flow measurement and control for all different gases involved.