LIQUI-FLOW™ Thermal Mass Flow Meters / Controllers for Liquids

Through-Flow Measurement of Low Liquid Flow Rates

LIQUI-FLOW™ digital Liquid Flow Meters/Controllers for low flow ranges operate on a thermal, through-flow measuring principle. The instruments are equipped with a digital pc-board, featuring self-diagnostics, alarm and counter functions, digital communication (RS232) and a variety of fieldbus options.

  • Lowest range 0,25 ... 5 g/h
  • Highest range 20 ... 1000 g/h for fluids with thermal properties similar to H2O


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Quick link to Mass Flow Meter / Controller model pages

Full Scale capacities (based on H2O) versus Pressure Rating

PN 100 bar (Mass Flow Meter) PN 100 bar (Mass Flow Controller)
L13  |  5 ... 100 g/h L13V12  |  5 ... 100 g/h
L23  |  100 ... 1000 g/h L23V12  |  100 ... 1000 g/h


  • Fast and accurate measurement
  • No moving parts
  • Thru-Flow measurement
  • Suitable for liquids with low boiling point
  • Attitude insensitive
  • Very small internal volume
  • In combination with a control valve: continuous and stable control
  • Analog I/O-signals, RS232-connection; optional on-board fieldbus interface


Liquid Flow Meters / Controllers

Liquid Flow Meters

Liquid mass flow meters of the LIQUI-FLOW™ series are built around a stainless steel tube without any moving parts or obstructions. The heater/sensor assembly is arranged around the tube and, by following the anemometric principle, a constant difference in temperature (ΔT) is created and the energy required to maintain the ΔT is dependent on the mass flow rate. Due to the benefits of the unique patented sensor, the fluid will be warmed to a maximum of 5°C, thereby making the LIQUI-FLOW™ Series suitable for fluids with low boiling points.

Liquid Flow Controllers

Flow control is achieved by integrating a control valve onto the body of the Liquid Flow Meter. This control valve has a purge connection to eliminate air or gas during start-up. The electronic control function forms part of the normal circuitry in the meter.

For ultra low flow ranges, Bronkhorst offers the µ-FLOW series. Ranges: 1,5 ... 30 mg/h up to 0,1 ... 2 g/h IPA- or H2O-equivalent.

MASS-STREAM Waste water application


  • Semiconductor industry
  • Pharmaceutical industry
  • Food industry (flavors, additives)
  • Biotechnical industry
  • Analytical laboratories
  • HPLC-applications

Application story