At Bronkhorst, we believe that innovation thrives through collaboration. That’s why we actively contribute to initiatives that push the boundaries of sensor technology. One such initiative is the METEORIET program — a multi-year, multi-partner effort to improve the testing of micro-electromechanical systems (MEMS). These projects are co-funded by the European Union through the EFRO program for East Netherlands.
Advancing MEMS testing
What are MEMS and why do they matter?
Micro-electromechanical systems (MEMS) are chips that combine electrical and non-electrical properties — including mechanical, thermal, fluidic, and optical characteristics. MEMS technology is widely used in sensors, such as precision flow meters and motion detectors. For Bronkhorst, MEMS play a key role in advancing mass flow measurement, enabling higher performance and added functionality in our instruments. To scale up production of these advanced sensors, reliable and efficient testing is essential. Traditionally, sensor testing occurs after product assembly, which can lead to inefficiencies and material waste. The METEORIET projects aim to change that.
METEORIET I: exploring early-stage MEMS testing
In the first METEORIET project (MEms TEst voor hOog-volume Innovatieve Elektronische Toepassingen), Bronkhorst collaborated with Salland Engineering, MASER Engineering, Saxion University of Applied Sciences, and the University of Twente. The goal: to explore chip-scale and wafer-scale testing methods that use electrical signals to measure physical parameters.
By identifying faulty sensors at the wafer level — before assembly — manufacturers can significantly reduce waste and improve production efficiency. This early diagnostics approach laid the foundation for the next phase of development.
METEORIET II: From prototype to product
Building on the success of the first project, METEORIET II focuses on bringing the developed test technology from Technology Readiness Level (TRL) 6 to TRL 8 — from prototype to operational product. The project runs from January 2024 to December 2026 and is a collaboration between Salland Engineering, Bronkhorst, and Saxion.
The core innovation in METEORIET II is a wafer-scale MEMS test method that uses only electrical stimuli to determine non-electrical properties. This approach accelerates the test process, reduces costs, and enables semi-automated, high-volume MEMS production. It also strengthens the regional “test valley” ecosystem in East Netherlands.
Bronkhorst’s contribution
In both METEORIET I and II, Bronkhorst plays a key role by:
- Delivering wafers for testing — ranging from actual sensors to test structures — produced in the MESA+ cleanroom.
- Sharing in-depth knowledge of sensor behavior and testing requirements to help shape a complete and effective testing solution.
- Applying insights from the project to improve internal processes and product development, including the FlexiFlow platform, where MEMS chips are central to performance and diagnostics.
Looking ahead
As MEMS technology continues to evolve, so does the need for smarter, faster, and more scalable testing methods. Through the METEORIET projects, Bronkhorst contributes to shaping the future of sensor innovation — not only for our own solutions, but for the broader high-tech ecosystem in the Netherlands and beyond.
Supported by the European Union
The METEORIET II project is co-funded by the European Regional Development Fund (EFRO) under the East Netherlands 2021–2027 program. The total project budget is €2,174,838.62, with €967,593.81 in EU funding.
