{"column":{"component":"Media","content":{"media":{"src":{"mobile":"/media/ag4jc1wc/mocvd-semiconductor-industry.jpg?width=668&height=0&format=webp&v=1dc70b29f2405e0","tablet":"/media/ag4jc1wc/mocvd-semiconductor-industry.jpg?width=1145&height=0&format=webp&v=1dc70b29f2405e0","desktop":"/media/ag4jc1wc/mocvd-semiconductor-industry.jpg?width=1642&height=0&format=webp&v=1dc70b29f2405e0"},"alt":"MOCVD in semiconductor market","type":"image","link":{},"width":668,"height":0},"caption":""}}}
Application requirements
Using flow controllers for the hydrogen gas supply, can improve the MOCVD process and therefore the product quality. Stable flow conditions and a fast response of the flow controller to changes in settings is here required.
Important topics
Important topics
Precision and stability in Hydrogen flow regulation
Fast response with metal-sealed flow & pressure controllers
Full-service and customer support
Process solution
To improve the quality of the MOCVD process—and consequently the LED output—Bronkhorst supplies EL-FLOW Metal Sealed flow instruments for integration into the MOCVD equipment.
These controllers regulate the hydrogen carrier gas flow, which is critical for process stability. The flow rate directly affects the deposition rate of LED components, making precise control essential.
For this application, different sizes of EL-FLOW controllers are used, ranging from small units handling 20 sccm to larger ones managing 20 slm. Their metal-to-metal seal design ensures reliable resealing, and the high-quality surface finish meets the demanding standards of semiconductor and solar manufacturing.
In addition, EL-PRESS Metal Sealed pressure controllers are part of the setup. The use of these devices results in a stable hydrogen flow with fast response to changing process conditions, supporting consistent performance and improved process control.
Full-Service Support
Bronkhorst operates as a full-service office, offering calibration and repair. We also provide on-site visits to advise customers on optimal device usage and share tips for process improvement. This level of support is unmatched by competing suppliers.
“Bronkhorst combined high-quality instruments with exceptional service, setting them apart from other suppliers.”
Recommended products
EL-FLOW Select
Lab-style Mass Flow Meter/Controller for gases
For 0.014 mln/min - 1670 ln/min
Accuracy ****
Best selling all-rounder for diverse applications
Suitable for pressures up to 400 bar
View range
Related articles
Mass flow controllers for FOUP
Implementing Bronkhorst mass flow controllers in FOUP purge processes, manufacturers can ensure cleanliness, reduce contamination risks, and optimize operational efficiency—meeting the high demands of today’s advanced semiconductor industry.
Read more
Supercritical fluid measurement and control
Supercritical fluid processes demand measurement technology that goes beyond conventional methods. With Coriolis mass flow meters you can achieve consistent and accurate flow control. Even under rapidly changing physical condition when using supercritical fluids.