Mass Flow / Pressure Controllers for Low Gas Flows
FLEXI-FLOW Compact Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information.
FLEXI-FLOW Compact Mass Flow / Pressure Controllers are currently available in 3 variants:
- 'Preconfigured Advanced' (PA), turndown 1:500, flow + temperature + up- and downstream pressure, 4 flow ranges (FS, based on N2):
Type FF-A500 - 500 mln/min
Type FF-A2K0 - 2 ln/min
Type FF-A5K0 - 5 ln/min
Type FF-A20K - 20 ln/min
- 'Preconfigured Standard' (PS), turndown 1:50, flow + temperature, 4 flow ranges (FS, based on N2):
Type FF-S500 - 500 mln/min
Type FF-S2K0 - 2 ln/min
Type FF-S5K0 - 5 ln/min
Type FF-S20K - 20 ln/min
- 'Built-to-Order' (BtO), turndown 1:1000; free selection of ranges between 0,5 and 20 ln/min (FS, based on N2),
Type FF-C10: flow + temperature
Type FF-C11: flow + temperature + up- and downstream pressure;
BtO models may also be used to configure multi-channel versions up to 8 channels.