Bronkhorst

EL-FLOW Metal Sealed F-201CM

Metal Sealed Mass Flow Controller for Gases

  • Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
  • Electropolished wetted parts
  • Cleanroom asembled
  • High accuracy, excellent repeatability
  • Multi Gas / Multi Range functionality (option)
  • Fast settling time (down to 600 msec)
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EL-FLOW Metal SealedF-201CM

Metal Sealed Gas Mass Flow Controllers

Bronkhorst® model F-201CM Mass Flow Controllers (MFCs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-201CM is suited for precise measurement and control of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N2) at operating pressures between vacuum and 1000 psig (64 bar).

EL-FLOW® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP or FLOW-BUS protocols. The EL-FLOW® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,12…6 mln/min
max. 1…50 ln/min
Accuracy (incl. linearity) (based on actual calibration)±0,5% Rd plus ±0,1% FS
Repeatability< 0,2 % RD
Turndown ratioup to 1:187,5 (1:50 in analog mode)
Max. operating pressure1000 psig (64 bar)
Multi fluid capabilitystorage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs
Settling time (in control, typical)1 second typical above 5% FS;
option: down to 600 msec
Control stability± 0.05% FS (typical for 1 slm N2)
Operating temperature-10…+70°C (Viton or EPDM valve seat);
0…70°C (NC valve with Kalrez 6375 seat);
0…50°C (NO valve with Kalrez 6375 seat)
Temperature sensitivityzero: < 0.05% FS/°C; span: < 0.05% Rd/°C
Pressure sensitivity< 0,1% Rd/bar typical N2;
< 0,01% Rd/bar H2
Leak integrity, outboard< 2 x 10-11 Pa.m3/s He
Leak-by through closed valve (Metal sealed)< 10-5 Pa.m3/s He
Attitude sensitivitymay be mounted in any position
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable
Process connections1/4” face seal male
SealsOuter seals: metal-to-metal (no rings);
Inner seal / valve seat: Kalrez® (FFKM); options: Viton®, EPDM
Weight0,7 kg
Ingress protectionIP40
Electrical properties
Power supply+ 15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
Metal Sealed Mass Flow and Pressure brochure

Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select

Dimensional drawings
Dimensional drawing F-201CM
Dimensions Digital Cases

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
Optional Bus and IO Configurations


Bronkhorst USA inc.

57 South Commerce Way
Suite 120
USA - Bethlehem, PA 18017 
Tel.  +1-610-866-6750
[email protected]

     
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