Bronkhorst

EL-FLOW Select F-200CV

Digital Thermal Mass Flow Controller for Gases

  • Lowest gas flow rates
  • Compact design, small internal volume
  • High accuracy and repeatability
  • Virtually pressure and temperature independent
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EL-FLOW Select F-200CV

Gas Mass Flow Controllers for lowest flow rates

Bronkhorst® model F-200CV Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min at operating pressures between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.

EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus or FLOW-BUS protocols.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min max. 0,6…9 mln/min
Accuracy (incl. linearity) (based on actual calibration)±0,8% Rd plus ±0,2% FS F-200CV-005; ±2% FS for F-200CV-002
Repeatability< 0,2 % RD
Turndown ratio1:50 (in digital mode up to 1:187,5)
Multi fluid capabilityStorage of max. 8 calibration curves
Settling time (in control, typical)2 4 sec.
Control stability≤ ± 0,1 % FS
Operating temperature-10 +70 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity0,1 % RD
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable
Pressure rating (PN)64 bar abs
Process connectionscompression type or face seal couplings
Sealsstandard: Viton; options: EPDM, Kalrez (FFKM)
Weight0,6 kg
Ingress protectionIP40
Electrical properties
Power supply+15 24 Vdc
PROFIBUS DPadd 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINETadd 77 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT®add 66 mA (15 V supply) or 41 mA (24 V supply)
CANopen® / DeviceNet™add 48 mA (24 V supply)
Analog output0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232; options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
EL-FLOW Select brochure
EL-FLOW Select flow range table

Manuals
Quick installation guide EL-FLOW Select
Manual EL-FLOW Select

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
Optional Bus and IO Configurations
PROFIBUS DP
PROFINET
CANopen

Dimensional drawing
Dimensional drawing F-200CV-F-210CV-F-200DV
Dimensions Digital Cases
Dimensions Adapters

Solids 3D
F-200CV EL-FLOW



Bronkhorst USA inc.

57 South Commerce Way
Suite 120
USA - Bethlehem, PA 18017 
Tel.  +1-610-866-6750
[email protected]

     
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