Ex-Protected Mass Flow Meter for High Gas Flow

  • ATEX approval Cat.2, Zone 1
  • Also IECEx, TIIS and KCs certified
  • High accuracy, excellent repeatability
  • Virtually pressure and temperature independent
  • "Wafer type" for mounting between flanges (DN100 / 4")
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Intrinsically Safe Gas Mass Flow Meters for high flow rates

Bronkhorst® EX-FLOW Mass Flow Meters (MFMs) are suited for precise gas flow measurement in ATEX Zone 1 hazardous areas. The MFM should be connected to a power supply with galvanic isolation / preamplifier / readout system (located in the safe zone). See Bronkhorst® E-8000 Series.

EX-FLOW model F-106DX covers flow ranges from 3,6...180 m3n/h up to 36...1800 m3n/h (N2-equivalent) at operating pressures up to 40 bar.

The intrinsically safe measuring head of the flow meter is tested according to ATEX 114 Directive 2014/34/EU and approved under EC-Type Examination Number: KEMA 01ATEX1172, protection II 2 G Ex ib IIC T4 Gb.
Other certifications: IECEx (IECEx DEK14.0060), TIIS (検・第TC21584号) and KCs = Ex ib IIC T4.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 3,6…180 m3n/h
max. 36…1800 m3n/h
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 1 % FS up to 1100 m3n/h N2-equivalent; for higher flows please contact factory
Repeatability< 0,2 % RD
Turndown ratio1:50 (2…100%)
Time constant5 sec.
Operating temperature-10 … +70 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable
Pressure rating (PN)up to 40 bar abs (PN10, 16, 40);
for hazardous gases such as O2, H2, etc. do not exceed operating pressure of 10 bar; for higher
pressure select a flanged type MFM, series F-107/F-117.
Process connectionsWafer type, for mounting between flanges according to DIN DN100 or ANSI 4”
Sealsstandard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®
Ingress protectionIP65
Electrical properties
Output signal15 … 20 mA (linear)
Terminal connection, cable gland M16x1,5
I/O signals via PS/Readout (located in safe area)analog: 0…5 Vdc, 0…10 Vdc, 0…20 mA, 4…20 mA;
digital: RS232, PROFIBUS DP, DeviceNet™, Modbus RTU or ASCII, PROFINET, EtherCAT®, FLOW- BUS
Electrical connection
Ex-proof measuring headTerminal connection, cable gland M16x1,5
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


EX-FLOW brochure
Manual EX-FLOW meters and controllers - ATEX
Manual EX-FLOW meters and controllers - IECEx
Manual EX-FLOW meters and controllers - TIIS
Manual EX-FLOW meters and controllers - KCs
Hook-up diagram
MFM Measuring Head
Dimensional drawing
Dimensional drawing F-106AX-F-106GX
IECEx: IECEx DEK14.0060
TIIS: 検・第TC21584号 (Japanese certification)
KCs: Ex ib IIC T4 (Korean certification)