Ex-Protected Mass Flow Controller for Gases

  • ATEX approval Cat.2, Zone 1
  • High accuracy, excellent repeatability
  • Virtually pressure and temperature independent
  • Compact design
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Intrinsically Safe Gas Mass Flow Controllers for higher flow rates

Bronkhorst® EX-FLOW Mass Flow Controllers (MFCs) are suited for precise gas flow control in ATEX Zone 1 hazardous areas. The flow meter part and the control valve of the MFC should be connected (via separate cables) to a power supply with galvanic isolation / preamplifier / readout system (located in the safe zone) which contains a controller board to complete the control loop. See Bronkhorst® E-8000 Series.

EX-FLOW model F-213AX covers flow ranges from 4...200 ln/min up to 25...1250 ln/min (N2-equivalent) at operating pressures up to 100 bar.

The intrinsically safe measuring head of the flow meter is tested according to ATEX 114 Directive 2014/34/EU and approved under EC-Type Examination Number: KEMA 01ATEX1172, protection II 2 G Ex ib IIC T4 Gb.
The intrinsically safe valve coils are explosion proof certified and available in two options (ATEX certification only):
Coil XB: protection II 1 G Ex ia IIC T6 / protection II 1 D Ex ta IIIC T80°C
Coil XC: protection II 2 G Ex eb IIC T4 / protection II 2 D Ex tb IIIC T130°C

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 4…200 ln/min
max. 25…1250 ln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)± 1 % FS
Repeatability< 0,2 % RD
Turndown ratio1:50 (2…100%)
Time constant5 sec.
Control stability≤ ± 0,1 % FS typical
Operating temperature-10 … +65 °C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Max. Kv-value0,15 … 1,5
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable
Pressure rating (PN)100 bar abs
Max. ΔP20 bar(d)
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Ingress protectionIP65
Electrical properties
Output signal15 … 20 mA (linear)
Terminal connection, cable gland M16x1,5
I/O signals via PS/Readout (located in safe area)analog: 0…5 Vdc, 0…10 Vdc, 0…20 mA, 4…20 mA;
digital: RS232, PROFIBUS DP, DeviceNet™, Modbus RTU or ASCII, PROFINET, EtherCAT®, FLOW- BUS
XB-coilCoil voltage max. 28 V/110 mA;
295 Ohm at 20°C
XC-coilCoil voltage max. 24 V;
65 Ohm at 20°C, Pmax = 9 W at 20°C
Electrical connection
Ex-proof measuring headTerminal connection, cable gland M16x1,5
Control valve coilcable gland M20x1,5
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


EX-FLOW brochure
Manual EX-FLOW meters and controllers - ATEX
Manual EX-FLOW meters and controllers - IECEx
Manual EX-FLOW meters and controllers - TIIS
Manual EX-FLOW meters and controllers - KCs
Hook-up diagram
MFM Measuring Head
Dimensional drawing
Dimensional drawing F-203AX-F-213AX