IQ+FLOW® Ultra Compact Mass Flow Meters / Controllers

World's Smallest Mass Flow Meter / Controller

Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSI™ system.

Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure meters and controllers.

  • Lowest range 0,2...10 mln/min
  • Highest range 0,1...5 ln/min


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Quick link to Mass Flow Meter / Controller model pages

Mass Flow Meter model pages

Full Scale capacities versus pressure rating and style 

PN 10 bar - in-line style PN 10 - top-mount style
IQF-100C    |  0,01 ... 5 ln/min IQFD-100C  |  0,01 ... 5 ln/min

Mass Flow Controller model pages

Full Scale capacities versus pressure rating and style 

PN 10 bar - in-line style PN 10 bar - top-mount style
IQF-200C    |  0,01 ... 5 ln/min IQFD-200C  |  0,01 ... 5 ln/min

High intrinsic quality, featuring...

  • Compact assembly ensures space efficiency
  • Economical solution, low cost of ownership
  • Analog or digital communication
  • Top-mount modules; easily accessible
  • Pre-tested “Plug and Play” manifold assemblies, reducing custom testing requirements


Ultra compact design based on micro solid state technology (MEMS)

Customer specific designs

Based on the micro system technology of IQ+FLOW® series, Bronkhorst also offers the possibility to combine functional modules on a compact manifold. See IQ+FLOW manifold solutions

IQ-FLOW Brochure
Manual / Quick Installation Guides Instruments
IQ+FLOW manual
IQ+FLOW quick installation guide
Hook-up diagrams


Examples of analytical applications based on the ultra compact modules with a footprint of 0.75” are:

  • Flow – Pressure control at the injector side of a GC
  • Flow control at the detector side of a GC or HPLC
  • Flow control in an FID (Flame Ionisation Detector)

Application stories