µ-FLOW Mass Flow Meters and Controllers for Liquids

Measurement / Control of Ultra Low Flow Rates

µ-FLOW digital Liquid Flow Meters/Controllers for low flow ranges operate on a thermal, through-flow measuring principle. The instruments are equipped with a digital pc-board, featuring self-diagnostics, alarm and counter functions, digital communication (RS232) and a variety of fieldbus options.

  • Lowest range 5 ... 100 mg/h
  • Highest range 0,1 ... 2 g/h (fluids with thermal properties similar to H2O)


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Quick link to Mass Flow Meter / Controller model pages

Full Scale capacities (based on H2O) versus Pressure Rating

PN 400 bar (Mass Flow Meter) PN 100 bar (Mass Flow Controller)
L01  |  0.1…2 g/h L01V12  |  0.1…2 g/h


  • No moving parts
  • Thru-Flow measurement
  • Attitude insensitive
  • Fast and accurate measurement
  • Negligible dead-volume (sensor: 1,5...33 µl)
  • In combination with a control valve: continuous and stable control
  • Analog I/O-signals, RS232-connection; optional on-board fieldbus interface 
  • Stainless Steel sensor
  • On request: pressure rating up to 1000 bar (15000 psi)


Liquid Flow Meters / Controllers

Liquid Flow Meters

Liquid mass flow meters of the µ-FLOW series are built around a stainless steel tube without any moving parts or obstructions. The heater/sensor assembly is arranged around the tube and a constant power is applied to warm up the liquid inside the tube. Flowing liquid results in shift of the temperature difference (ΔT) which is proportional to the mass flow. Due to the benefits of the applied sensor, the fluid will be warmed to a maximum of 5°C, thereby making the µ-FLOW Series suitable for fluids with low boiling points.

Liquid Flow Controllers

Flow control is achieved by integrating a control valve onto the body of the Liquid Flow Meter. This control valve has a purge connection to eliminate air or gas during start-up. The electronic control function forms part of the normal circuitry in the meter.

 µ-FLOW in lab


  • Pharmaceutical industry
  • Food industry (flavors, additives)
  • Biotechnical industry
  • Analytical laboratories
  • Evaporation processes (see CEM/VDM-system)
  • HPLC/UPLC applications