μ-FLOW L01

Ultra Low-Flow Thermal Liquid Mass Flow Meter

  • Fast and accurate measuring signal
  • Insensitive to mounting position
  • Very small internal volume (sensor: 1,5...33 μl)
  • Suitable for liquids with low boiling points
  • Analog, RS232 or fieldbus communication
Get a quote Downloads Support

Liquid Mass Flow Meters for Ultra Low Flow Rates

Bronkhorst® model L01 Liquid Flow Meters (LFMs) are suited for precise measurement of flow ranges between 5…100 mg/h and 0,1...2 g/h at operating pressures up to 400 bar. The LFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve.

μ-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus or FLOW-BUS protocols.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 5…100 mg/h max. 0,1...2 g/h
Accuracy (incl. linearity) (based on actual calibration)± 2 % FS
Repeatability< 0,2 % FS (typical H2O)
Turndown ratio1:20 (5...100%)
Operating temperature5 50 °C
Temperature sensitivity± 0,2% FS/°C
Attitude sensitivitynegligible
Warm-up timeapprox. 10 min. for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L/320; others on request
Pressure rating (PN)400 bar abs
Process connections1/16” or 1/8” OD compression type; other on request (<1 g/h we advise to use 1/16" only)
Ingress protectionIP40
Electrical properties
Power supply+15 24 Vdc +/-10%
PROFIBUS DPadd 53 mA (15 V supply) or 30 mA (24 V supply)
CANopen® / DeviceNet™add 48 mA (24 V supply)
Analog output0...5 (10) Vdc or 0 (4)...20 mA (sourcing output)
Digital communicationstandard: RS232; options: PROFIBUS DP, DeviceNet™, Modbus RTU, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male)
PROFIBUS DPbus: 9-pin D-connector (female); power: 9-pin D-connector (male)
CANopen® / DeviceNet™5-pin M12-connector (male)
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


μ-FLOW series L01 brochure

General manual digital instruments
Operating instructions digital instruments

Hook-up diagrams
Analog IO - RS232

Dimensional drawing
Dimensional drawing μ-FLOW L01

Bronkhorst USA inc.

57 South Commerce Way
Suite 120
USA - Bethlehem, PA 18017 
Tel.  +1-610-866-6750
[email protected]

Copyright © 2020 Bronkhorst. All rights reserved.     Sitemap     Disclaimer     Privacy note