mini CORI-FLOW Ex d XM14

Ex-Proof Coriolis Mass Flow Meter/Controller for low flow rates

  • High accuracy, excellent repeatability
  • Fast response
  • Independent of fluid properties
  • Additional density and temperature output
  • IECEx and ATEX Zone 1 approved
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mini CORI-FLOW Ex dXM14

Ex-proof Coriolis Mass Flow Meters/Controllers for low flow rates

mini CORI-FLOW Ex d Mass Flow Meters are precise and compact instruments for low flow rates, based on the Coriolis measuring principle, built in an explosion proof housing for use in IECEx and ATEX Zone 1 hazardous areas, ATEX approval II 2 G Ex d e IIB T6 Gb. Bronkhorst® model XM14 Mass Flow Meter (MFM) is suited for highly accurate measurement of gas or liquid flow in the range of 0…30 kg/h (which corresponds with 0…400 ln/min when used on nitrogen) at operating pressures up to 107 bar (a).

The instrument contains a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve or pump.

Technical specifications

Measurement / control system
Flow ratesLiquid: 0…30 kg/h (nominal flow rate: 10 kg/h);
Gas: 0…400 ln/min (N2);
Full Scale (FS) value is user-configurable
Mass flow accuracyLiquid: ±0,2% Rd;
Gas: ±0,5% Rd
Repeatability±0,05% of rate ± ½(ZS* x 100/actual flow)%
Turndown ratioMeter: up to 1:100;
Controller: ≥ 1:50
Zero stability (ZS)< ± 6 g/h
(Guaranteed at constant temperature and for unchanging process and environmental conditions.)
Response time (sensor)200 msec
Settling time (in control, typical)1 sec. (typical)
Temperature rangeAmbient temperature range: 0…55°C;
Process temperature range: 0…70°C
Temperature effecton zero: < 0,5 g/h/°C;
on span: < 0,001% Rd/°C;
self heating (at zero flow): < 15°C
(Depends on flow rate, heat capacity fluid, T amb., T fluid and cooling capacity.)
MountingAny position, attitude sensitivity negligible.
External shocks or vibrations should be avoided.
Temperature accuracy± 0,5 °C
Density accuracy< ± 5 kg/m³ (at full scale flow)
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Warm-up time< 30 min for optimum accuracy
Mechanical parts
Sensorsingle tube, DN 1.3
Valve seatKalrez®-6375, other on request
(for controllers)
Material (wetted parts)stainless steel 316L or comparable
Pressure rating (PN)107 bar abs
Process connections1/8" OD compression type (welded);
other on request
Ingress protectionIP66
Electrical properties
Power supply+15…24 Vdc +/- 10%
Max. ripple recommended: 50 mV tt
Max. power consumptionMeter: max. 3 W;
Controller: max. 7 W
Analog output0…5 (10) Vdc, min. load impedance > 2 kΩ;
0 (4)…20 mA (sourcing), max. load impedance < 375 Ω;
on request: Ex i output 4…20 mA
Analog setpoint(for MFM + pump or control valve)
0…5 (10) Vdc, min. load impedance > 100 kΩ;
0 (4)…20 mA (sourcing), max. load impedance ~ 250 Ω
Digital communicationstandard: RS232;
options: PROFIBUS DP, DeviceNet™, Modbus RTU or FLOW-BUS
Electrical connectionAll instrument connections are wired to screw terminals
Electrical connection
Control valve options
External actuator options to be connected to the controller
Electromagnetic control valve (Bronkhorst®)C2I valve with XC coil or XB coil through barrier
Pneumatic actuated control valve (Badger Meter)RC200 valve with Ex d TEIP11 I/P converter
Mass Flow Meter controlled pumpPump with ATEX zone 1 U/f converter
Certification for hazardous areas
Approvals (MFM)ATEX: II 2 G Ex d e IIB T6 Gb | DEKRA 12ATEX0144X |
IECx: Ex d e IIB T6 Gb | IECEx DEK 12.00400 |
TIIS Zone 1 / JP Ex IIB T6 Gb | DEK 19.0041 |
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website


mini CORI-FLOW Ex d brochure
Manual (incl. dimensions)
mini CORI-FLOW Ex d - Manual
IECEx: IECEx DEK 12.0040
TIIS Zone 1 / JP Ex: DEK 19.0041