IQ+FLOW® Ultra compact Pressure Meters / Controllers

Pressure Sensors based on MEMS Technology

Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSI™ system.

Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ⁺FLOW^® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure meters and controllers.

• Lowest range 0,01...0,5 bar
• Highest range 0,2...10 bar

Customer specific designs

Based on the micro system technology of IQ⁺FLOW^® series, Bronkhorst also offers the possibility to combine functional modules on a compact manifold. See IQ⁺FLOW manifold solutions