Gas Mass Flow Controllers with Electrical Shut-Off Valves
Bronkhorst® model F-201CS Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,2…10 mln/min and 0,8…15 ln/min at operating pressures between vacuum and 10 bar abs. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. For extra efficiency or safety, the F-201CS features an integrated, electrically operated shut-off valve.
EL-FLOW® Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.