mini CORI-FLOW™ M14V10I

Low Flow Coriolis Mass Flow Controller for Gases

  • High accuracy, excellent repeatability
  • Fast response
  • Independent of fluid properties
  • Additional density and temperature output
  • Compact, rugged (IP65) design
  • Optional ATEX approval Cat.3, Zone 2
  • Valve function: Normally Closed
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mini CORI-FLOW™M14V10I

Low Flow Coriolis Mass Flow Controllers for Gases

mini CORI-FLOW™ Mass Flow Meters and Controllers are precise and compact instruments, based on the Coriolis measuring principle, designed to cover the needs of the low flow market. Bronkhorst® model M14V10I Mass Flow Controller (MFC) is suited for highly accurate control of gas flow ranges between 0,03…1 kg/h and 0,6…30 kg/h (which corresponds with 0,4…13,3 ln/min up to 8…400 ln/min when used on nitrogen) at operating pressures up to 100 bar (higher on request). The instruments are equipped with a robust IP65 weatherproof housing and are optionally available with ATEX approval for use in Zone 2 hazardous areas.

The instrument contains a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for mass flow control by means of an integrated control valve (normally closed).

Technical specifications

Measurement / control system
Flow range
(intermediate ranges available)
min. 0,03…1 kg/h
max. 0,6…30 kg/h
Mass flow accuracy ±0,5% of rate
Turndown ≥ 1:50
Repeatability ±0,05% of rate ± ½(ZS* x 100/actual flow)%
Zero Stability (ZS)* < ±6 g/h
Settling time (<2% of setpoint) 1 sec. (typical)
Max. Kv-value 1,7 x 10-2
Operating temperature 0…70°C;
for ATEX Cat.3, Zone 2 max. 50°C
Temperature effect** on zero: < 0,5 g/h/°C;
on span: < 0,001% Rd/°C;
self heating (at zero flow): ≤ 15°C
Temperature accuracy ±0,5°C
Density accuracy < ±5 kg/m3
Mounting*** Any position, attitude sensitivity negligible
Leak integrity (outboard) < 2 x 10-9 mbar l/s He
Warm-up time > 30 min. for optimum accuracy
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable
Housing stainless steel 430F
Sensor single tube, DN 1.3
Pressure rating 100 bar abs
Process connections (welded) compression type or face seal couplings
Seals metal
Valve seat Kalrez®-6375, other on request
Weight 1,5 kg
Ingress protection (housing) IP65 (weatherproof)
Electrical properties
Power supply +15…24 Vdc +/- 10%
Max. ripple recommended: 50 mV tt
Max. power consumption max. 7 W
Analog output 0...5 (10) Vdc, min. load impedance > 2 kΩ;
0 (4)...20 mA (sourcing), max. load impedance < 375 Ω
Analog setpoint 0...5 (10) Vdc, min. load impedance > 100 kΩ;
0 (4)...20 mA (sourcing), max. load impedance ~ 250 Ω
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 8-pin DIN (male);
PROFIBUS DP bus: 5-pin M12 (female);
power: 8-pin DIN (male);
Devicenet™/FLOW-BUS/Modbus 5-pin M12 (male);

* Guaranteed at constant temperature and for unchanging process and environment conditions.
**   Depends on flow rate, heat capacity fluid, T amb., T fluid and cooling capacity.
***  To be rigidly bolted to a stiff and heavy mass or construction for guaranteed zero stability.
External shocks or vibrations should be avoided.
Technical specifications and dimensions subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the productpage on our website


MINI CORI-FLOW M12-M14 brochure

MINI CORI-FLOW Quick Installation Guide

Hook-up diagrams
Analog I-O RS232

Dimensional drawing
Meters - compression type weld adapters
Meters - VCR type machined adapters
Controllers - compression type weld adapters
Controllers - VCR type machined adapters
C5I Controllers - compression type weld adapters
C2I Controllers - compression type weld adapters
Controllers - on a 2 kg mass block
Controllers - on a 4 kg mass block

Solids 3D
M12V10I-M13V10I-M14V10I 1-4VCR
M12V10I-M13V10I-M14V10I excl. adapters
Mass block mini Cori-Flow Mxx 2kg
Mass block mini Cori-Flow Mxx 4kg

Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
[email protected]

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