Application examples
Flow control in MOCVD
Bronkhorst metal-sealed flow controllers are used in a MOCVD process for LED manufacturing to enable precise control of carrier gases. Bronkhorst not only delivered the flow controllers, but also provided unmatched full-service support—from calibration to on-site advice—ensuring optimal performance for this customer.
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Mass flow controllers for FOUP
Implementing Bronkhorst mass flow controllers in FOUP purge processes, manufacturers can ensure cleanliness, reduce contamination risks, and optimize operational efficiency—meeting the high demands of today’s advanced semiconductor industry.
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Supercritical fluid measurement and control
Supercritical fluid processes demand measurement technology that goes beyond conventional methods. With Coriolis mass flow meters you can achieve consistent and accurate flow control. Even under rapidly changing physical condition when using supercritical fluids.
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Why Bronkhorst for the semiconductor market?
Bronkhorst specializes in optimizing fluidic control technology. The level of accuracy of our flow instruments is essential for chemical vapor deposition (CVD), spray coating for flat-panel displays (FPD) and atomic layer deposition (ALD) processes. And the availability of metal sealed flow instruments can help you in optimizing your direct liquid injection systems.
Why Bronkhorst for the semiconductor market?
Bronkhorst specializes in optimizing fluidic control technology. The level of accuracy of our flow instruments is essential for chemical vapor deposition (CVD), spray coating for flat-panel displays (FPD) and atomic layer deposition (ALD) processes. And the availability of metal sealed flow instruments can help you in optimizing your direct liquid injection systems.
Made in Europe
Experience the assurance of European craftsmanship. Our flow instruments are engineered and manufactured in Europe, delivering premium quality, reliability, and compliance with the highest industry standards. Perfect for the demands of semiconductor processes.
Global presence with local service
With offices and partners worldwide, we combine global reach with local expertise. Wherever you operate, you can rely on our support tailored to your region.
Support by application engineers with extensive experience
Our team with skilled application engineers brings decades of experience in fluidic measurement and control processes. They understand your challenges and work closely with you to optimize your system and achieve precise, repeatable results.
Our products for the semiconductor industry
EL-FLOW Select
Lab-style Mass Flow Meter/Controller for gases
For 0.014 mln/min - 1670 ln/min
Accuracy ****
Best selling all-rounder for diverse applications
Suitable for pressures up to 400 bar
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MASS-STREAM
In-line Mass Flow Meter/Controller for industrial gases
For 0.01 - 10000 ln/min
Accuracy ***
On board gas database
Low pressure drop
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EL-PRESS
Lab-style Digital Electronic Pressure Meter / Controller
Up to 400 bar
Suitable for non-inert (reactive) gases
Seamless integration with flow instruments
Wide portfolio
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Find a solution
Find the right instrument for your gas, liquid, vapor, or pressure application. With our extensive range of products, we’ll help you match your needs. Start exploring now and discover your ideal solution.
