EX-FLOW Ex-Proof Mass Flow Meters / Controllers for gases

ATEX Zone-1 Certified (Intrinsically Safe)

EX-FLOW instruments are thermal Mass Flow Meters (MFM) / Controllers (MFC) of rugged design and suitable for gas flow application in hazardous areas. The intrinsically safe measuring head is tested according to ATEX 114 Directive 2014/34/EU and approved under EC-Type Examination Number: KEMA 01ATEX1172, protection II 2 G Ex ib IIC T4 Gb.

Other certifications (MFM only):

  • IECEx = IECEx DEK14.0060
  • TIIS = 検・第TC21584号 (Japanese certification)

The housing of the electronics compartment is to IP65 classification. Control valves can either be integrally or separately mounted, to measure and control gas flows (air-equivalent).

  • Lowest range  0,16...8 mln/min
  • Highest range  220...11.000 m3n/h (Mass Flow Meter), 7,5...375 m3n/h (Mass Flow Controller)

Gas Flow Control

An EX-FLOW Mass Flow Controller has a control valve with fast and smooth control characteristics. The flow meter and valve should be connected (via separate cables) to a power supply with galvanic isolation / preamplifier / readout system (located in the safe zone) which contains a controller board to complete the control loop. The control valve receives its input from the controller board and immediately responds to any deviation between the output signal from the flow sensor and the setpoint signal.

Bronkhorst applies two sorts of coils:

  • Style "XB" = intrinsic safe coil; needs safety barrier.
    • protection II 1 G Ex ia IIC T6
    • protection II 1 D Ex ta IIIC T80°C 
  • Style "XC" = moulded coil; no safety barrier required.
    • protection II 2 G Ex eb IIC T4
    • protection II 2 D Ex tb IIIC T130°C
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  • ATEX approval Cat.2, Zone 1
  • Pressure ratings up to 400 bar
  • Rugged, weatherproof housing (IP65, dust and waterproof)




  • Process gas measurement or control in (petro-) chemical industries
  • Fuel cell technology
  • Gas distribution systems
  • Hydrogenation processes
  • Gas consumption measurement for internal accounting
  • Heating or biogas production

Application story

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Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
[email protected]

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