Bronkhorst

IN-FLOW F-200CI

Industrial Style Thermal Mass Flow Controller for Gases

  • Lowest gas flow rates
  • Compact design, small internal volume
  • High accuracy and repeatability
  • Virtually pressure and temperature independent
  • Rugged, weatherproof housing (IP65, dust and waterproof)
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IN-FLOWF-200CI

Industrial Style Gas Mass Flow Controllers for lowest flow rates

Bronkhorst® model F-200CI Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min with pressure rating between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 or FM Class I, Div. 2 approval.

IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)±0,8% Rd plus ±0,2% FS for F-200CI-005;
±2% FS for F-200CI-002
Repeatability< 0,2 % RD
Turndown ratioup to 1:187,5 (1:50 in analog mode)
Multi fluid capabilityStorage of max. 8 calibration curves
Settling time (in control, typical)2 … 4 sec.
Control stability< ± 0,1 % FS
Operating temperature-10 … +70 °C
for ATEX cat. 3 and FM Class 1 Div 2 : 0…50°C
Temperature sensitivityzero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts)stainless steel 316L or comparable
Pressure rating (PN)64 bar abs
Process connectionscompression type or face seal couplings
Sealsstandard: FKM/Viton®;
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Weight1,3 kg
Ingress protectionIP65
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
extra for fieldbus
<75 mA
<50 mA
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
Electrical connection
Analog/RS2328 DIN (male);
PROFIBUS DPbus: 5-pin M12 (female);
power: 8 DIN (male);
CANopen® / DeviceNet™5-pin M12 (male);
FLOW-BUS/Modbus-RTU/ASCII5-pin M12 (male)
Modbus TCP / EtherNet/IP / POWERLINKbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
EtherCAT®/ PROFINETbus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
IEC 61010-1IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
IN-FLOW brochure
Manuals
General manual digital instruments
Operating instructions digital instruments
Quick Start Guide IN-FLOW
Hook-up diagrams
Analog IO - RS232
DeviceNet
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
Industrial Ethernet (EtherCAT, EtherNet/IP, Modbus-TCP, POWERLINK, PROFINET)
CANopen
Optional Bus and IO Configurations
Dimensional drawing
Dimensional Drawing F-200CI
Certificates
ATEX: KEMA 10ATEX0111X
KCs certificate IN-FLOW MFC models (Korean)
FM approval Class I, Div. 2 (US), FM17US0363X
FM approval Class I, Div. 2 (CA), FM17CA0173X