Flow controllers for diamond production (CVD diamonds)

Bronkhorst EL-PRESS pressure controllers are applied to ensure the required constant value of the low pressure inside the plasma chamber.  
 
The EL-FLOW Select thermal mass flow controllers are used for the accurate control of the flow of gases supplied to the reactor. Methane (CH4) is used as carbon precursor, and hydrogen (H2) is supplied to the reactor to help diamond formation. Depending on the customer, other gases such as nitrogen (N2), argon (Ar) and oxygen (O2) can be supplied. Typical flows are in the low flow regime for hydrogen (about 1000 ml/min), and in the low to ultra-low flow regime for methane and other gases. Bronkhorst devices accurately control the flow even at ultra-low setpoints in the range of 3 ml/min and lower. 

By engaging with relevant system-building companies worldwide and understanding their specific requirements, Bronkhorst has successfully delivered a solution for leak-free accurate flow control and stable pressure control — critical factors in ensuring high-quality diamonds. Depending on the customer's needs, Bronkhorst supplies various combinations of EL-PRESS pressure controllers and EL-FLOW Select thermal mass flow controllers. These devices support different communication protocols, including Modbus, FLOW-BUS, and PROFIBUS.

An advantage of using these devices in low-pressure applications is their inherent ability to perform control operations without significant leakage, ensuring stable and accurate process conditions. Their fast response time and low settling time further enhance their effectiveness in diamond production. 

As an economical solution, Bronkhorst offers the FLOW-SMS setup, designed to address the customer needs for space efficiency. These compact Surface Mount Sub-systems integrate mass flow or pressure sensor modules with (control) valves and other functional accessories, all mounted on a rail system according to customer specifications. Additionally, the MANI-FLOW series provides a similar client-specific setup, now mounted on a compact manifold.

Bronkhorst operates globally, providing sales and service support in various countries. This ensures that CVD diamond system builders receive timely assistance. Combined with a deep understanding of the CVD process and market requirements, Bronkhorst serves as a dependable partner, providing reliable solutions to the customers.