Technical specifications

Type Of Media

Dry, clean and non-corrosive gases

Flow measuring principle

Thermal

Series range

For 0.2 mln/min - 5 ln/min

Accuracy

< ±1.5% Rd + ±0.5% FS

Repeatability

for flows < 20 mln/min: < ±0.2% FS; for flows > 20 mln/min: < ±0.5% Rd

Max. Pressure bar(g)

10

Operating Temperature

5…+50°C

Ingress Protection

IP40

IQ+FLOW models

Ultra compact flow meters and controllers ideally suited for use in desktop equipment where space is limited and for equipment manufacturers. The flow sensors are based on MEMS Technology.

Search for a model

IQF-100C
Microfluidic Mass Flow Meter for Gases

min. 0.2...10 mln/min

Max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications
IQF-200C
Microfluidic Mass Flow Controller for Gases

min. 0.2...10 mln/min

max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications
IQFD-100C
Microfluidic Mass Flow Meter for Gases, Downported

min. 0.2...10 mln/min

max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications
IQFD-200C
Microfluidic Mass Flow Controller for Gases, Downported

min. 0.2...10 mln/min

max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications

Downloads

Manuals

  • PDF

    Manual IQ- FLOW (9.17.045)

  • PDF

    Manual RS232 interface with ProPar protocol(9.17.027)

  • PDF

    Quick Start Guide IQ-FLOW (9.17.177)

Hook-up diagrams

  • PDF

    916101 Hook Up Diagram IQ+FLOW RS232 RS485

  • PDF

    916101 Hook Up Diagram IQ+FLOW RS232 RS485

  • PDF

    916101 Hook Up Diagram IQ+FLOW RS232 RS485

Certificates

  • PDF

    EU Declaration of Conformity instruments (9.06.021)

  • PDF

    EU Declaration of Conformity RoHS

Brochures

Where is the IQ+FLOW used?

Accessories

We offer a variety of accessories to work seamlessly with the IQ+FLOW.
Control valves

Control valves

For a wide variety of gas, liquid or pressure control applications

View products
19
IN-LINE gas filters

IN-LINE gas filters

Compact in-line filters for gas flow applications

View products
8
BRIGHT

BRIGHT

Compact Local Readout and Control Module

View products
4
Mass flow controller production Bronkhorst

Need help?

Whether you’re choosing a solution or need on-site support, we’re here to help. From expert advice to reliable service, you can count on us to be close by and ready to assist.

Copyright © 2025 Bronkhorst. All rights reserved.

Control Management Technology (CMT)

333 Troy Circle, Suite X

TN 37919 Knoxville

(865) 584-0208

[email protected]

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