Technical specifications

Type Of Media

Dry, clean and non-corrosive gases

Flow measuring principle

Thermal

Series range

For 0.2 mln/min - 5 ln/min

Accuracy

< ±1.5% Rd + ±0.5% FS

Repeatability

for flows < 20 mln/min: < ±0.2% FS; for flows > 20 mln/min: < ±0.5% Rd

Max. Pressure bar(g)

10

Operating Temperature

5…+50°C

Ingress Protection

IP40

IQ+FLOW models

Ultra compact flow meters and controllers ideally suited for use in desktop equipment where space is limited and for equipment manufacturers. The flow sensors are based on MEMS Technology.

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IQF-100C
Microfluidic Mass Flow Meter for Gases

min. 0.2...10 mln/min

Max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications
IQF-200C
Microfluidic Mass Flow Controller for Gases

min. 0.2...10 mln/min

max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications
IQFD-100C
Microfluidic Mass Flow Meter for Gases, Downported

min. 0.2...10 mln/min

max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications
IQFD-200C
Microfluidic Mass Flow Controller for Gases, Downported

min. 0.2...10 mln/min

max. 0.1...5 ln/min

10 bar(g)

Downloads & specifications
IQP-500C
Microfluidic Pressure Meter
min. 0.01 - 0.5 bar, max. 0.2 - 10 bar
Downloads & specifications
IQP-600C
Microfluidic Forward Pressure Controller
min. 0.01 - 0.5 bar, max. 0.2 - 10 bar
Downloads & specifications
IQP-700C
Microfluidic Back Pressure Controller
min. 0.01 - 0.5 bar, max. 0.2 - 10 bar
Downloads & specifications
IQPD-500C
Microfluidic Pressure Meter, Downported
min. 0.01 - 0.5 bar, max. 0.2 - 10 bar
Downloads & specifications
IQPD-600C
Microfluidic Forward Pressure Controller, Downported
min. 0.01 - 0.5 bar, max. 0.2 - 10 bar
Downloads & specifications
IQPD-700C
Microfluidic Back Pressure Controller, Downported
min. 0.01 - 0.5 bar, max. 0.2 - 10 bar
Downloads & specifications

Downloads

Manuals

Certificates

  • PDF

    EU Declaration of Conformity instruments

  • PDF

    EU Declaration of Conformity RoHS

Brochures

Where is the IQ+FLOW used?

Accessories

We offer a variety of accessories to work seamlessly with the IQ+FLOW.
IN-LINE gas filters

IN-LINE gas filters

Compact in-line filters for gas flow applications

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8
BRIGHT

BRIGHT

Compact Local Readout and Control Module

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4
Control valves

Control valves

For a wide variety of gas, liquid or pressure control applications

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17
Mass flow controller production Bronkhorst

Need help?

Whether you’re choosing a solution or need on-site support, we’re here to help. From expert advice to reliable service, you can count on us to be close by and ready to assist.

Copyright © 2025 Bronkhorst. All rights reserved.

Process Solutions (PSC)

4134 Bluebonnet Dr. Suite 111

TX 77477 Stafford

(281) 491-3833

sales@psctexas.com

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