Bronkhorst

FLEXI-FLOW Compact FF-C1x

Compact Mass Flow and Pressure Controller for Gases

  • Swift and stable control
  • On-board gas conversion model
  • 22 unique gases embedded
  • Multi-parameter output: mass flow, temperature and pressure
  • USB-C and Bluetooth communication
  • Namur NE107 status indication
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FLEXI-FLOW CompactFF-C1x

Mass Flow / Pressure Controllers for Low Gas Flows

FLEXI-FLOW Compact Mass Flow / Pressure Controllers are suited for accurate measurement and control of flow ranges between 0…500 mln/min and 0…20 ln/min at operating pressures between vacuum and 17 bar(a). The instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction. Due to the unique TCS Technology (Through Chip Sensor), accurate mass flow measurement, virtual independent of variations in temperature and line pressure is established. In combination with integrated temperature and up- and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion. The multi-parameter instruments provide the user with useful process information. 

FLEXI-FLOW Compact Mass Flow / Pressure Controllers are currently available in 3 variants:

  • 'Preconfigured Advanced' (PA), turndown 1:500, flow + temperature + up- and downstream pressure, 4 flow ranges (FS, based on N2):
    Type FF-A500 - 500 mln/min
    Type FF-A2K0 - 2 ln/min
    Type FF-A5K0 - 5 ln/min
    Type FF-A20K - 20 ln/min
  • 'Preconfigured Standard' (PS), turndown 1:50, flow + temperature, 4 flow ranges (FS, based on N2):
    Type FF-S500 - 500 mln/min
    Type FF-S2K0 - 2 ln/min
    Type FF-S5K0 - 5 ln/min
    Type FF-S20K - 20 ln/min
  • 'Built-to-Order' (BtO), turndown 1:1000; free selection of ranges between 0,5 and 20 ln/min (FS, based on N2),
    Type FF-C10: flow + temperature
    Type FF-C11: flow + temperature + up- and downstream pressure;
    BtO models may also be used to configure multi-channel versions up to 8 channels.

Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0…500 mln/min
max. 0…20 ln/min
(based on N2)
Pressure rangesPA: 0...17 bar(a)
PS: not available
BtO: FF-C10: not available / FF-C11: 0...17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)PA: ±0,8% Rd plus ±0,2% FS (N2/Air/O2);
PS: ±1,5% Rd plus ±0,5% FS (N2/Air/O2);
BtO: Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2);
for other gases add conversion uncertainty; see multi gas table;
RepeatabilityFlow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratioPS: 1:50
PA: 1:500
BtO: up to 1:1000
Max. operating pressure16 bar g
Multi Gas/Multi Rangeembedded gas data for 22 unique gases plus any mixture of these gases
Settling time (in control, typical)< 150 ms
Long term stability< 0,5% FS over period of 3 years; then < 0,2% FS per year
Control stability< ± 0,1% FS (typical for 1 ln/min N2)
Operating temperature0...50 °C
Mountingany position, attitude sensitivity negligible
Temperature sensitivityFlow sensor: zero 0,0015% FS/ºC; span 0,03% Rd/ºC;
Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors±0,5% FS
Pressure sensitivitystandard: < 0,15% Rd/bar typical N2;
with pressure correction: < 0,02% Rd typical N2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Leak-by through closed valvetypical < 1 x 10-4 mbar·l/s He
Mechanical parts
Material (wetted parts)aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality< 1,6 mu Ra (<0,8 mu Ra for stainless steel body)
Pressure rating (PN)16 bar(g) / 250 psig
Max. ΔP16 bar(d);
20 ln/min models: 5 bar (d)
Process connectionsBtO: compression type, push-in or face seal couplings;
PS / PA: to be ordered separately
SealsFKM 51415; valve seat: FFKM with PI film
BtO option: for other materials contact factory
Weight200 g with Aluminium body, 300 g with SS 316 body
Ingress protectionIP40
Instrument bodyBtO: Aluminium or Stainless steel (selectable);
PS / PA: Aluminium
Electrical properties
Power supply24 Vdc ± 10%
Max. power consumption2,0 Watt
Digital communicationModbus RTU or FLOW-BUS (selectable)
Support interfaceUSB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection9-pin D-sub (male)
CEEMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU
Electrical connection
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
FLEXI-FLOW brochure
Manuals
Manual FLEXI-FLOW
Quick installation guide FLEXI-FLOW
Hook-up diagrams
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS
Dimensional drawings
Dimensions FLEXI-FLOW Compact MFC-MFM
Solids 3D
FLEXI-FLOW Compact MFC-MFM


Bronkhorst USA LLC

57 South Commerce Way
Suite 120
USA - Bethlehem, PA 18017 
Tel.  +1-610-866-6750
sales@bronkhorstusa.com

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