Adam explains: EL-FLOW Prestige

EXPLANATION VIDEO
Do you want to learn more about the ins & outs of this series? Our colleague Adam will tell you all about it in this video.

Technical specifications

Type Of Media
Gases
Flow measuring principle
Thermal
Series range
For 0.014 mln - 100 ln/min
Accuracy

±0.5% Rd plus ±0.1% FS (according SEMI E56)

Repeatability
<±0.2% Rd (or <±0.04% FS whichever is greater)
Max. Pressure bar(g)
100
Operating Temperature
-10…+70°C
Ingress Protection
IP40

EL-FLOW Prestige models

High-end models to ensure the best sensor stability and the highest accuracy. Equipped with an on-board gas conversion model, including a gas database for 100 unique, customer selectable gases.

Downloads

Brochures
Certificates
Manuals
Hook-up diagrams

Accessories

We offer a variety of accessories to work seamlessly with the EL-FLOW Prestige.
Need help image

Need help?

Whether you’re choosing a solution or need on-site support, we’re here to help. From expert advice to reliable service, you can count on us to be close by and ready to assist.