Bronkhorst

EL-FLOW Prestige FG-210CV

High Performance Mass Flow Controller for Gases

  • On-board gas conversion model (Multi-Fluid / Multi-Range)
  • 100 unique gases embedded
  • User configurable I/O functions
  • Significantly reduced power consumption
  • Further advances in flow-signal processing
  • Highly stable flow control regime virtually impervious to process fluctuations
  • Advanced control valve design
Get a quote Downloads Support
EL-FLOW PrestigeFG-210CV

Gas Mass Flow Controllers for lowest flow rates

Bronkhorst® model FG-210CV High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 mln/min and 0,18…9 mln/min at operating pressures up to 100 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
(based on N2)
Accuracy (incl. linearity) (based on actual calibration)standard: ±0,5% Rd plus ±0,1%FS
(±0,8% Rd plus ±0,2% FS for ranges 3…5 mln/min;
±1% Rd plus ±1% FS for ranges < 3 mln/min)
Repeatability< 0,2 % RD
Turndown ratio1 : 150; in analog mode 1 : 50
Multi Gas/Multi Rangeembedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR functionality available up to 100 bar.
Settling time (in control, typical)< 2 sec.
Control stability≤ ± 0,1 % FS (typical for 1 ln/min N2)
Operating temperature-10 … 70 °C
Temperature sensitivityzero: < 0,02% FS/°C; span: < 0,025% Rd/°C
Pressure sensitivity<0,15% Rd/bar typical N2;
< 0,02% Rd/bar N2 (incl. pressure correction option)
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 1% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating (PN)100 bar g
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: Viton®
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds
Weight0,7 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
extra for fieldbus
<75 mA
<50 mA

(based on normally closed valve, pin 5 not used)
Analog output0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, FLOW-BUS
Electrical connection
Analog/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
CEEMC 2014/30/EU, RoHS 2011/65/EU,
IEC 61010-1IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)
Control valve options
External actuator options to be connected to the controller
Ex-proof specifications
Approvals / certificates

Technical specifications subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the product page on our website

Downloads

Brochures
EL-FLOW Prestige brochure

Manuals
Quick installation guide
Manual EL-FLOW Prestige

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
Optional Bus and IO Configurations

Dimensional drawing
Dimensional Drawing FG-200CV - FG-210CV


Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
[email protected]

Copyright © 2020 Bronkhorst. All rights reserved.     Sitemap     Disclaimer     Privacy note